The inner surfaces of three samples (alumina and copper tubes, ozonizer) were treated by ozone. The surface reactions of oxygen and ozone were studied after this treatment. The surface reaction of gaseous molecular oxygen leads to fast ozone creation. The created ozone again reacts with the surface, which leads to its destruction. These reactions can be explained as surface reactions between adsorbed oxygen atoms and molecules or as surface reactions of these adsorbed species with gaseous species.