1979
DOI: 10.1016/0040-6090(79)90101-9
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Study of NbGeSi films deposited by chemical vapour deposition

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Cited by 6 publications
(1 citation statement)
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“…19,20) The Nb/Si atomic ratio is close to Nb 3 Si 2 , which was reported as a phase different from Nb 5 Si 3 . 21,22) Nb 3 Si 2 is considered to be one of metastable phases in the Nb-Si system formed usually due to impurity contamination.…”
Section: Resultsmentioning
confidence: 99%
“…19,20) The Nb/Si atomic ratio is close to Nb 3 Si 2 , which was reported as a phase different from Nb 5 Si 3 . 21,22) Nb 3 Si 2 is considered to be one of metastable phases in the Nb-Si system formed usually due to impurity contamination.…”
Section: Resultsmentioning
confidence: 99%