Study of metal organic chemical vapor deposition TiN thin films in real structures

Yi, Lijun; Zhang, Wenjie; Wu, Jin

doi:10.1016/j.tsf.2006.07.034

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2010

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“…The (200), (111) and (220) orientations of TiN x films in CVD has been widely obtained [21][22][23][24]. Pangarov [25] proposed a model to explain the preferred orientation.…”

Section: Resultsmentioning

confidence: 99%

Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system

Gong

Goto

2010

Surface and Coatings Technology

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“…The (200), (111) and (220) orientations of TiN x films in CVD has been widely obtained [21][22][23][24]. Pangarov [25] proposed a model to explain the preferred orientation.…”

Section: Resultsmentioning

confidence: 99%

Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system

Gong

Goto

2010

Surface and Coatings Technology

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Effect of Microstructure on the Electrical Properties of Nano-Structured TiN Coatings Deposited by Vacuum Cold Spray

et al. 2010

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TiN coatings on Al 2 O 3 substrates were fabricated by vacuum cold spray (VCS) process using ultrafine starting ceramic powders of 20 nm in size at room temperature (RT). Microstructure analysis of the samples was carried out by scanning electron microscopy, transmission electron microscopy, and x-ray diffraction. Sheet resistance of the VCS TiN coatings was measured with a four-point probe. The effects of microstructure on the electrical properties of the coatings were investigated. It was found that the sheet resistance and electrical resistivity of TiN coatings were significantly associating with the spray distance, nozzle traversal speed, and deposition chamber pressure. A minimum sheet resistance of 127 X was achieved. The microstructural changes can be correlated to the electrical resistivity of TiN coatings.

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Study of metal organic chemical vapor deposition TiN thin films in real structures

Cited by 2 publications

References 11 publications

Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system

Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system

Effect of Microstructure on the Electrical Properties of Nano-Structured TiN Coatings Deposited by Vacuum Cold Spray

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