Study of laser excited vibration of silicon cantilever

Abstract

International audienc

Carrier-Diffusion Wave and Thermal Wave in a Semiconducting Microcantilever Generated by Optical Excitation

“…For a cantilever with large ratio of length to thickness, the theoretical study can be reduced to analyze a one-dimensional problem. The simulation results showed a good agreement with that of experiment [5,6] . For three-dimensional problems, green function method was chosen due to its power, elegance and generality [7,8,9] .…”

Photothermal Response in Semiconducting Microcantilevers Produced by Laser Excitation

“…There are many mechanisms to drive a microstructure to vibrate, like electromechanical 5 , piezoelectric 7 , optomechanical 8 , photoacoustic (PA) [9][10][11][12] and photothermal (PT) [13][14] , etc. Among these, PT and PA sciences and technologies were used widely in investigation of semiconductors and microelectronic structures due to the merits of non-contact and non-destructive.…”

Photoacoustic detection of gases using microcantilevers

“…More generally, various laser based schemes have previously been deployed to provoke oscillations in an AFM cantilever, usually through direct interaction between the laser beam and the cantilever. For example, Ratcliff et al 11 used photothermal excitation to resonantly excite a metal-coated SiN cantilever and Song et al 12 used photoelastic modulation to vibrationally excite silicon cantilevers. To our knowledge, this is the first time photoacoustic excitation of a surrounding gas has been used to induce vibrations in a standard AFM microcantilever.…”