2014
DOI: 10.4028/www.scientific.net/amm.543-547.3716
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Study of Influencing Factors on Vacuum Evaporation Film Thickness

Abstract: The basic principle of vacuum evaporation deposition was introduced, the factors that influence the coating thickness in the process of evaporation coating has carried out by theoretical calculation and experimental analysis, and the influence law of film thickness was found out.

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