Study of growth kinetics of amorphous carbon nanopillars formed by PECVD

Громов, Д. Г.; Боргардт, Н. И.; Grishina, Ya.S.; Dedkova, A. A.; Kirilenko, E. P.; Dubkov, S. V.

doi:10.1117/12.2179765

Cited by 1 publication

(2 citation statements)

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“…Meanwhile, the plasma will induce an eddy current in the substrate, which is larger for a good conducting material, and results in a higher substrate temperature. Some literature has reported that higher substrate temperature usually leads to a better crystallinity [ 20 , 27 ]. This also help to produce a better quality VG.…”

Section: Resultsmentioning

confidence: 99%

“…Compared to graphene films grown parallel to the substrate, the growth mechanism of VG is still unclear [ 23 , 24 , 25 , 26 ]. For example, the initial of nucleation is under debate: some reports claim that thermal stress causes the buffer layer to warp, resulting in nucleation sites [ 27 ], while other reports assert that the stress caused by lattice mismatch is the reason for the tear of the buffer layer and the formation of nucleation sites [ 24 ]. In addition, the different etching rates of amorphous carbon (a-C), sp 3 -C, and sp 2 -C by the etchant (mainly atomic hydrogen) are considered to play a key role in the structure of VG [ 25 ].…”

Section: Introductionmentioning

confidence: 99%

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Effect of Substrate Types on the Structure of Vertical Graphene Prepared by Plasma-Enhanced Chemical Vapor Deposition

et al. 2021

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Although the structure of vertical graphene (VG) is important for various applications, the growth mechanism of VG is not yet fully clear. Here, the impacts of electrical conductivity of substrate on the morphology and structure of VG prepared by plasma-enhanced chemical vapor deposition are studied by scanning electron microscopy and Raman spectroscopy. The results show that VG with greater thickness can be grown on substrate with better electrical conductivity in the same growth time. Even though longer deposition time leads to more VG, more defects might develop in VG, especially at the position furthest away from the substrates. The change of morphology and structure of VG is closely correlated with strength of electric field near the substrate surface, which offers a new approach for orderly growing of VG. The discoveries not only shed light on the growth mechanism of VG, but also are beneficial for promoting the applications of VG.

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Section: Resultsmentioning

confidence: 99%