Study of frequency dependence of shear horizontal surface acoustic wave sensor for engine oil measurements

Kondoh, Jun; Nakayama, Kazuki; Kuznetsova, I. E.

doi:10.1016/j.sna.2020.112503

Cited by 16 publications

(6 citation statements)

References 25 publications

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“…Interference from the IDTs is avoided by directing the liquids solely along the SAW pathway in between the IDTs. These measures are easier to implement in delay line devices than in two-port resonators due to the larger dimensions of the SAW propagation path of delay lines but have been realized with both [12][13][14][15][16][17]. Another shielding approach, which is largely independent of the sensor design, is based on a conductive layer that covers the area of both the SAW path and the IDTs (and reflective fingers, if any).…”

Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

Rapp,

Voigt,

Dirschka

et al. 2024

Micromachines

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A surface acoustic wave (SAW) resonator chip setup is presented that eliminates interfering signal responses caused by changes in the electrical environment of the surrounding media. When using a two-port resonator, applying electrically shielding layers between the interdigital transducers (IDTs) can be challenging due to the limited dimensions. Therefore, a layered setup consisting of an insulating polymer layer and a conductive gold layer was preferred. The SAW resonators were provided with polycarbonate housings, resulting in SAW resonator chips. This setup enables easy application of a wide range of coatings to the active part of the resonator surface, while ensuring subsequent electrical and fluidic integration of the resonator chips into a microfluidic array for measurements. The signal responses of uncoated SAW resonators and those with polymer coatings with and without a gold layer were tested with aqueous potassium chloride (KCl) solutions up to 3 mol/L, corresponding to conductivities up to 308 mS/cm. The use of a polymer coating at the thickness of the first Love mode resonance and a conductive gold layer completely reduced the electrical impact on the SAW resonator signal response, making small signals resulting from changes in viscosity and density of the KCl solutions visible.

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Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

Rapp,

Voigt,

Dirschka

et al. 2024

Micromachines

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“…There are also papers devoted to the development of liquid sensors based on surface acoustic waves with the shear horizontal polarization (SH-SAW) [10][11][12][13][14] propagating in a lithium tantalate plate of the 36-YX cut. Two pairs of interdigital transducers, forming two acoustic channels, were deposited on a single plate.…”

Section: Introductionmentioning

confidence: 99%

“…The signal at the output of an electrically free channel was determined by the mechanical and electrical properties of the liquid. Such sensors were successfully used to analyze the quality and identification of liquids such as fruit juices [11], tea [12], motor oil [13] and methanol fuel [14]. However, this approach also does not allow for the separate determination of the elastic module, viscosity coefficient, conductivity and dielectric constant of liquids.…”

Section: Introductionmentioning

confidence: 99%

Determination of Electrical and Mechanical Properties of Liquids Using a Resonator with a Longitudinal Electric Field

Semyonov,

Zaitsev,

Teplykh

et al. 2024

Sensors

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The possibility of determining the elastic modules, viscosity coefficients, dielectric constant and electrical conductivity of a viscous conducting liquid using a piezoelectric resonator with a longitudinal electric field is shown. For the research, we chose a piezoelectric resonator made on an AT-cut quartz plate with round electrodes, operating with a shear acoustic mode at a frequency of about 4.4 MHz. The resonator was fixed to the bottom of a 30 mL liquid container. The samples of a mixture of glycerol and water with different viscosity and conductivity were used as test liquids. First, the frequency dependences of the real and imaginary parts of the electrical impedance of a free resonator were measured and, using the Mason electromechanical circuit, the elastic module, viscosity coefficient, piezoelectric constant and dielectric constant of the resonator material (quartz) were determined. Then, the container was filled with the test sample of a liquid mixture so that the resonator was completely covered with liquid, and the measurement of the frequency dependences of the real and imaginary parts of the electrical impedance of the loaded resonator was repeated. The dependences of the frequency of parallel and series resonances, as well as the maximum values of the electrical impedance and admittance on the conductivity of liquids for various viscosity values, were plotted. It was shown that these dependences can be used to unambiguously determine the viscosity and conductivity of the test liquid. Next, by fitting the theoretical frequency dependences of the real and imaginary parts of the electrical impedance of the resonator loaded with the liquid under study to the experimental dependences, the elastic module of the liquid and its dielectric constant were determined.

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“…The dependence of acoustic wave properties on a liquid conductivity made it possible to propose a large number of acoustoelectronic sensors. First, of them were based on shear-horizontal surface acoustic waves characterized by maximal value of the mechanical displacement component lying in the plane perpendicular to the wave vector [ 14 , 15 , 16 , 17 ]. Further, it was suggested to use for the same sensors the zero-order waves with shear-horizontal polarization propagating in the thin plate whose thickness is comparable with the acoustic wavelength.…”

Section: Introductionmentioning

confidence: 99%

Multimode Design and Piezoelectric Substrate Anisotropy Use to Improve Performance of Acoustic Liquid Sensors

Smirnov

Анисимкин

Воронова³

et al. 2022

Sensors

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Using acoustic wave modes propagation in piezoelectric plates loaded with conductive liquids, peculiarities of the mode-liquid acoustoelectric interaction are studied. It is found that (i) in contrast to bulk and surface acoustic waves propagating in piezoelectric semiconductors, the acoustoelectric attenuation of the modes is not symmetric in respect to its maximum, (ii) a large increase in attenuation may be accompanied by a small decrease in phase velocity and vice versa, (iii) the peculiarities are valid for “pure” (without beam steering) and “not pure” (with beam steering) modes, as well as for modes of different orders and polarizations, and (iv) conductivity of test liquid increases electromagnetic leakage between input and output transducers, affecting results of the measurements. To decrease the leakage, the liquid should be localized between transducers, outside the zone over them. If so, the mode sensitivity may be as large as 8.6 dB/(S/m) for amplitude and 107°/(S/m) for phase. However, because of comparable cross-sensitivity towards viscosity and dielectric permittivity, modes with selective detection of liquid conductivity are not found.

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Study of frequency dependence of shear horizontal surface acoustic wave sensor for engine oil measurements

Cited by 16 publications

References 25 publications

Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

Determination of Electrical and Mechanical Properties of Liquids Using a Resonator with a Longitudinal Electric Field

Multimode Design and Piezoelectric Substrate Anisotropy Use to Improve Performance of Acoustic Liquid Sensors

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