Study of Flow Structure Relating to the Heat and Mass Transfer in Micro Liquid Films in Marangoni Drying Processes of Silicon Wafer

Miyamoto, Yasuharu; Nagai, Hiroaki; Kamoshida, Junji; Suzuki, Kohei

doi:10.1615/ihtc13.p12.330

Multiphase 2006

DOI: 10.1615/ihtc13.p12.330

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Study of Flow Structure Relating to the Heat and Mass Transfer in Micro Liquid Films in Marangoni Drying Processes of Silicon Wafer

Yasuharu Miyamoto

Hiroaki Nagai

Junji Kamoshida

et al.

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Study of Flow Structure Relating to the Heat and Mass Transfer in Micro Liquid Films in Marangoni Drying Processes of Silicon Wafer

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See others like this or search for similar articles

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