Study of Al2O3 thin films by ALD using H2O and O3 as oxygen source for waveguide applications

Caballero-Espitia, Diana Laura; Lizárraga-Medina, E.G.; Borbón-Nuñez, H.A.; Contreras-López, O.E.; Tiznado, H.; Márquez, H.

doi:10.1016/j.optmat.2020.110370

Cited by 8 publications

(3 citation statements)

References 41 publications

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“…The aim of this paper is to explore the possibility of realizing integrated optics components by means of an Al 2 O 3 atomic layer deposition process (ALD) [21,22]. The synthesis of submicron optical waveguides and design of ring resonators by means of Al 2 O 3 atomic layer deposition technique has been performed [23].…”

Section: Introductionmentioning

confidence: 99%

Desing of grating couplers for submicron optical waveguides

Lugo¹,

García-Guerrero²,

Inzunza-González³

et al. 2023

Rev. Mex. Fís.

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Optical coupling gratings are strategic components of integrated optics that allow the interaction of a laser signal with optical interconnects, integrated photonic microdevices and biosensors. In this work, the design of binary and sinusoidal type coupling gratings for Al2O3/SiO2/Si submicron guides operating in the visible (633 nm) and infrared (1550 nm) is presented herein. In particular, the coupling efficiency is analyzed as a function of the main design parameters: waveguide thickness, period, etch depth and incidence angle. The results indicate that coupling efficiencies of 21 and 15 percent and decoupling efficiencies of 25 and 22 percent can be obtained for binary and sinusoidal gratings, respectively, at a wavelength of 1550 nm; coupling efficiencies of 7.8 and 7.6 percent and decoupling efficiencies of 53 and 34 percent can be obtained for a wavelength of 633 nm. The proposed designs have potential applications for the fabrication of integrated circuits.

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Section: Introductionmentioning

confidence: 99%

Desing of grating couplers for submicron optical waveguides

Lugo¹,

García-Guerrero²,

Inzunza-González³

et al. 2023

Rev. Mex. Fís.

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“…With the background of energy utilization and environmental protection, the photo-degradation of organic pollutants has been actively studied (Medda et al, 2020;Cheng et al, 2021a;Wang et al, 2021a). To reduce the pressure on the environment caused by organic pollutants, many processes including ozone-oxidation method, photo-degradation method, activated-carbon adsorption method, and so on have been designed to degrade the organic pollutants (Caballero-Espitia et al, 2020;Wang et al, 2021b;Wang et al, 2021c). Among these methods, the photo-degradation method is an efficient method to degrade organic dyes from wastewater.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Fibrous Micro-nano Hierarchical Porous Cerium Dioxide Materials by the Impregnation and Thermal Decomposition Method and Its Enhanced Photocatalytic Activity

Zhang

Chen

et al. 2022

Front. Mater.

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Fibrous micro-nano hierarchical porous cerium dioxide materials were prepared from oriental paperbush flower stems by impregnation and thermal decomposition methods. Thermogravimetric analyzer (TG, DSC), field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), N2 adsorption-desorption isothermals, temperature-programmed reduction (TPR), and UV-Vis spectrophotometer were used to characterize the thermal decomposition behavior, microstructure and photocatalytic properties of fibrous micro-nano hierarchical porous cerium dioxide materials. The results proved that the achieved products retained a fibrous morphology similar to oriental paperbush flower stems with the original biotemplate in material completely removed. The average diameter of CeO2 particles on the surface of the material is about 9 nm, and the large specific surface area is around 55.6 m2/g. UV-Vis absorption spectra showed that the fibrous micro-nano hierarchical porous cerium dioxide materials have high light absorption capacity and can respond to simulated sunlight. The effects of initial dye concentration, catalyst concentration, pH value, cycle number, and irradiation time on the photocatalytic activity of fibrous micro-nano hierarchical porous cerium dioxide materials for the photo-degradation of methylene blue under simulated solar irradiation were systematically studied. A reasonable photocatalytic mechanism is proposed based on the experimental results and theoretical analysis. This strategy can be extended to synthesize other broad bandgap semiconductor oxides with high photocatalytic activity for the photo-degradation of organic dyes under simulated solar irradiation.

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“…This feature makes ALD suitable for use in electronic and photonic devices based on transparent and flexible substrates, including polymers or hybrid structures with organic or low-dimensional materials [ 3 , 4 , 5 ]. Furthermore, ALD is commonly used for the fabrication of high- k dielectrics, transparent conductive oxides (TCOs), or conductive materials as gate-dielectrics in metal-oxide-semiconductor (MOS) devices [ 6 , 7 ], materials for non-volatile memory (NVSM) structures [ 8 , 9 ], optical coatings in lasers or light-emitting devices (LEDs) [ 10 , 11 ], membranes [ 12 ], sensing devices [ 13 ], waveguides [ 14 ], or photovoltaics [ 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor

et al. 2021

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The continuous development of ALD thin films demands ongoing improvements and changes toward fabricating materials with tailored properties that are suitable for different practical applications. Ozone has been recently established as a precursor, with distinct advantages over the alternative oxidizing precursors in the ALDs of advanced dielectric films. This study reports alumina (Al2O3) and hafnia (HfO2) formation using an O3 source and compares the obtained structural and electrical properties. The performed structural examinations of ozone-based materials proved homogenous high-k films with less vacancy levels compared to water-based films. The enhanced structural properties also result in the problematic incorporation of different dopants through the bulk layer. Furthermore, analysis of electrical characteristics of the MIS structures with ALD gate dielectrics demonstrated the improved quality and good insulating properties of ozone-based films. However, further optimization of the ALD technique with ozone is needed as a relatively low relative permittivity characterizes the ultra-thin films.

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Study of Al2O3 thin films by ALD using H2O and O3 as oxygen source for waveguide applications

Cited by 8 publications

References 41 publications

Desing of grating couplers for submicron optical waveguides

Desing of grating couplers for submicron optical waveguides

Synthesis of Fibrous Micro-nano Hierarchical Porous Cerium Dioxide Materials by the Impregnation and Thermal Decomposition Method and Its Enhanced Photocatalytic Activity

Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor

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