Study of a piezoelectric multimorph based micro-scanner

Abstract

This paper concerns the modeling of a piezoelectric micro-scanner. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. A complete analytical model of the piezoelectric micro-scanner is presented. Each step of the modeling has been validated by Finite Element Modeling. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon microscanner, is intended for further HDL integration, thereby allowing rapid system level simulation and optimization.

Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application

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