Study of a dual frequency atmospheric pressure corona plasma

Kim, Dan Bee; Moon, Se Youn; Jung, Heesoo; Gweon, Bomi; Choe, Wonho

doi:10.1063/1.3430636

Cited by 20 publications

(11 citation statements)

References 18 publications

(23 reference statements)

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“…The advantage of the time modulation is that the relative high electron and reactive species density (typically in RF plasmas) is present, while having a lower gas temperature due to the low duty cycle (20%) (see also e.g. [40][41][42]).…”

Section: Ccd-imagesmentioning

confidence: 99%

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

et al. 2014

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Cold atmospheric pressure plasma jets are often used as a remote plasma source for substrate treatments. However, this substrate acts as an electrode and this additional electrode can induce effects on plasma parameters such as the dissipated power, gas temperature, etc. In this work the influence of substrates of different conductivity and permittivity in direct contact with three different operational modes of atmospheric pressure RF plasma jets is investigated. Two different electrode configurations (creating either a linear or a cross electric field) and, for the linear field configuration, two voltage modulations (continuous RF and kHz pulsed RF) have been studied. Electrical and optical diagnostic methods have been performed in order to get quantitative data of the change in plasma dissipated power and gas temperature, when the plasma is in direct contact with the substrate. In all three investigated cases the power dissipation and gas temperature, significantly increase when the plasma is in direct contact with a conductive substrate. The increase of power is attributed to a change of the equivalent electrical circuit, leading to a more favourable matching between the power input and the plasma source.

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Section: Ccd-imagesmentioning

confidence: 99%

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

et al. 2014

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“…Atmospheric pressure plasmas have been actively explored in fields ranging from microstructure to large-scale applications because of their wide potential as reactive plasmas [1][2][3][4][5][6]. In the past, most studies have focused on the development and optimization of the plasma to enhance the production yield of chemical species for specific utilizations or on empirically discovering new phenomena through parametric studies and direct characterization of the plasma [7][8][9][10]. Alongside the practical approach, it is also important to understand the underlying fundamental physics and chemistry of the produced plasma, which is only possible through obtaining detailed information about the plasma properties.…”

Section: Introductionmentioning

confidence: 99%

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Park

Choe

Kim

et al. 2015

Plasma Sources Sci. Technol.

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Electron diagnostics based on electron-neutral atom (e-a) bremsstrahlung in the UV and visible range emitted from atmospheric pressure plasmas is presented. Since the spectral emissivity of the e-a bremsstrahlung is determined by electron density (n e) and mean electron temperature (T e) representing the Maxwellian electron energy distribution, their diagnostics is possible. As an example, emission spectra measured from capacitive discharges are presented, which show good agreement with the theoretically calculated emissivity of the e-a bremsstrahlung. For a single pin electrode nanosecond-pulsed plasma jet (n-PPJ) in argon, we investigate the electron properties and the temporal behavior of the positive streamers. Streamers with many branches are clearly observed inside the dielectric tube, while a few main streamers propagate outside the tube along the jet axis. A two-dimensional (2D) measurement of the time-averaged T e distribution was developed using a commercial digital camera and optical band pass filters based on the emissivity ratio of two wavelengths of the e-a bremsstrahlung. The viable measurement range of T e is 0.5-7 eV for the choice of two wavelengths of 300s and 900s nm and 0.5-4 eV for two wavelengths of 400s and 900s nm, which are uncontaminated by the atomic and/or molecular spectra. The 2D T e distribution obtained using 514.5 and 632.8 nm emissions helps to reveal the role of electrons in streamer characteristics in the argon n-PPJ. Time-averaged T e of 2.0 eV and 1.0 eV inside and outside the tube, respectively, were measured. The streamer dynamics of the n-PPJ is shown to be dependent on T e .

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“…On the other hand, since plasma jet devices generate plasma plumes in an open air rather than a confined chamber, it can deposit thin films on the substrates with-out limitation to the sizes and complexity of geometries. Furthermore, dual-frequency (DF) plasma jet has low-frequency (LF, kHz) and radio-frequency (RF, MHz) plasma [11,12] . The LF discharge has long plasma plume length and low gas temperature but low electron density.…”

Section: Introductionmentioning

confidence: 99%

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation

Wang¹,

Yuan²,

Zhou³

et al. 2014

Plasma Sci. Technol.

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Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon (6 slm) and a small amount of acetone (0-2100 ppm). Plasma composition was measured by optical emission spectroscopy (OES). In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds (-CHx, C=O, C=C, CO -C) presented in the deposited film.

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Study of a dual frequency atmospheric pressure corona plasma

Cited by 20 publications

References 18 publications

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation

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