Abstract:Abstract. As one of the key components in lithography, the UV light source has very high demands for wavelength of source and energy. To meet the requirements of UV light source, it demands UV reflectance coating prepared on Φ78mm Mg-Al alloy paraboloid lampshade . Based on design theory of film, H4 and SiO 2 were selected as high and low refractive index materials respectively, and with the help of TFCalc, adopting electron beam vacuum coating method, the reflectance coating was prepared, which satisfied the … Show more
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