Study and application on thermal EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) technique

He, Cunfu; Zhang, Haus; Song, Junlei; Tian, Power; Wang, Winter

doi:10.1109/ipfa.2018.8452556

Cited by 2 publications

(2 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The EOP analysis is a technique to check the timing characteristic by irradiating the operating chip with the laser of a specific frequency and by conducting the Fourier Transform of the changing laser frequency which causes the on-off toggling of the interested transistor. [4] The result of the EOP analysis shows no difference in signal between the word line on-off period in the poly un-etch sample (Figure 9), and a timing delay of about 150ns in the TiN bunker sample (Figure 10). The TEM cross section analysis was also conducted on the two failing samples, as shown in Figure 11.…”

Section: Verification (Eop and Tem)mentioning

confidence: 96%

Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit)

Lee

Kim

Lim

et al. 2021

International Symposium for Testing and Failure Analysis

View full text Add to dashboard Cite

In this paper, we compare and describe the difference between the oscilloscope pulsing test and the WGFMU (Waveform Generator Fast Measurement Unit) in analyzing the defect of high resistance in DRAM main cell sample. The nanoprobe system has many constraints in the pulsing analysis utilizing the oscilloscope and pulse generator. There are certain cases where the system cannot support analysis when the saturation current is extremely minimal, such as the DRAM cell. In this paper, we address this constraint and propose a new way to conduct pulsing tests using the WGFMU's arbitrary linear waveform generator in the nanoprobe system.

show abstract

Section: Verification (Eop and Tem)mentioning

confidence: 96%

Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit)

Lee

Kim

Lim

et al. 2021

International Symposium for Testing and Failure Analysis

View full text Add to dashboard Cite

show abstract

“…Die backside analysis gives rise to fault isolation techniques that would not have been possible front-side. Electro-Optical Probing (EOP) is one of these systems; it makes use of the inherent reflectivity of the conducting channel of the MOSFET to signify switching activity on digital circuits [3]. The design of digital blocks, include testability in the form of Scan chain tests, which are basically a daisy chain of shift registers interspersed with the functional logic [4].…”

Section: Introductionmentioning

confidence: 99%

Electro-Optical Probing for Capturing Fast-to-Rise Scan Chain Failures

Villareal

Estores

Baert

2021

International Symposium for Testing and Failure Analysis

View full text Add to dashboard Cite

The paper discusses an imaging sensor exhibiting a fast-to-rise sanity check failure from a scan chain test. The DUT was prepared for backside analysis in a portable daughter-card [1] that enabled the analyst to easily shift between testing platforms such as a standard imaging tester bench and compact scan diagnosis system [2], while being inspected under the Electro-Optical Probing (EOP) machine. To find a failing flip-flop in several-thousands long chain, broken scan chain analysis was performed to narrow down the search to a few chain links was implemented. EOP methods of fault isolation were employed to verify the location of the broken scan cell in those selected flip-flops. Finally, parallel lapping was done to confirm the location of the failing flip-flop under a SEM.

show abstract

Study and application on thermal EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) technique

Cited by 2 publications

References 2 publications

Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit)

Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit)

Electro-Optical Probing for Capturing Fast-to-Rise Scan Chain Failures

Contact Info

Product

Resources

About