Studies on pyrolytically sprayed SnO2 and Sb-SnO2 thin films for LPG sensor applications

Abstract

Abstract. Undoped and antimony doped tin oxide thin films of different thicknesses were prepared on mineral glass substrate by spray pyrolysis method via sol-gel route. Both the films show good transmittance in the visible region. Band gap energy of both films lies between 3 to 3.5 eV. X-ray diffraction studies of undoped and antimony doped tin oxide thin films for various annealing temperature show polycrystalline tetragonal structure of SnO2 with preferred orientation of (110) and (101), respectively and from the XRD data, grain size were also evaluated. AFM images of Undoped and antimony doped tin oxide thin films annealed at 375 ~ depict the film thickness and indicate uniform surface pattern without dark pits and with strains of some ups exceeding the specified limit. The prepared films were tested in a specially developed test rig for Liquefied Petroleum Gas detection at different operating temperatures. The response characteristics of the films for LPG detection show maximum sensitivity and minimum response time at the operating temperature 400 ~ Studies indicate that antimony doped tin oxide thin film are one among the suitable candidates for LPG detection with a detection sensitivity and response time (t90) of 11 and 140 seconds, respectively.

Mobility enhancement of p-type SnO2by In-Ga co-doping

“…5. The optical band‐gap of the film deduced by extrapolating the linear portion to the energy axis is 3.38 eV, which closely coincides with the pure SnO 2 prepared by spray pyrolysis 22.…”

Improvement of tin oxide single crystal on anm-plane sapphire substrate by mist chemical vapor deposition

“…Wide-bandgap oxide semiconductors, such as ZnO, Ga 2 O 3 , indium tin oxide, indium gallium zinc oxide, and tin oxide (SnO 2 ) have been investigated for applications in optical devices, power devices, transparent conductive films, [1][2][3] thin-film transistors, and gas sensors [4][5][6][7] because of their excellent optical and electrical properties. Polycrystalline SnO 2 films with a wide bandgap of about 4 eV have been widely used in transparent conductive films and gas sensors.…”

“…Polycrystalline SnO 2 films with a wide bandgap of about 4 eV have been widely used in transparent conductive films and gas sensors. [1][2][3][4][5][6][7] Recently, single-crystalline SnO 2 films were applied in UV sensors and Schottky diodes. 8,9) However, to apply epitaxial SnO 2 films in commercial devices, their crystallographic qualities should be more improved.…”

Tin oxide thin films deposited by spray CVD using ethanol solution of tin (II) chloride

“…tin oxide (Sn0 2 ) films. Antimony or fluorine-doped tin oxide films were often reported [12][13][14][15][16][17][18][19] although antimony and fluorine is hazardous. The present work is focused to environmentally-benign undoped tin oxide film.…”