Studies on evaporated titanium oxide thin films for oxygen gas detection

Abstract

Abstract. Present work deals with the preparation of TiO2 thin films of different thicknesses by PVD technique using an electron beam and to characterize the films for oxygen gas detection. The films were characterized using optical transmission measurements, XRD and atomic force microscopy. From the spectral data, the extinction, absorption coefficient and refractive index of the films are evaluated and reported. The optical band gap energy varies between 3 and 3.68 eV. The XRD pattern confirms the formation of polycrystalline anatase structure of Titanium with preferred orientation of (110) plane. The AFM images indicate the presence of coarse and fine grains with uniform as well as smooth surfaces over the entire range of the analyzed surface. Response characteristics of TiO 2 thin films for oxygen gas detection are studied, which indicate a low response time of 120 seconds and high sensitivity of 16 at the operating temperature 450 ~

Studies on Spray Deposited SnO2, Pd:SnO2 and F:SnO2 Thin Films for Gas Sensor Applications

“…The sensitivity, response and recovery characteristics of the as-coated TO, FTO and PTO films towards CO gas detection have been studied at different operating temperatures in a sensor test rig setup. [10] RESULTS AND DISCUSSION…”