Abstract:Sb2Te3 films were magnetron sputtered using a 99.999% pure Sb2Te3 target from Cerac to study their growth morphology and transport properties. Optical emission spectroscopy was used to monitor the plasma conditions during growth. The films were grown on aluminosilicate glass substrates at temperatures from ~30 o C to 270 o C and characterized by x-ray diffraction, four point probe, and Hall-effect studies. All the films had a metallic luster, were opaque in the visible, and increased in grain size as substrate… Show more
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