We report on atom probe tomography studies of variable chemical decorations at extended defects in Cu-poor and Zn-rich Cu 2 ZnSnSe 4 thin films. For a precursor film, which was co-evaporated at 320 • C, grain boundaries and dislocations are found enriched with Cu. Furthermore, Na out-diffusion from the soda-lime glass substrate occurs even at such a low temperature, resulting in Na segregation at defects. In contrast, stacking faults in the precursor film show clear Zn enrichment as well as Cu and Sn depletion. After an annealing step at 500 • C, we detect changes in the chemical composition of grain boundaries as compared to the precursor. Moreover, we measure an increase in the grain boundary excess of Na by one order of magnitude. We show that grain boundaries and dislocations in the annealed Cu 2 ZnSnSe 4 film exhibit no or only slight variations in composition of the matrix elements. Thus, the effect of annealing is a homogenization of the chemical composition.