Structures and Electronic Properties of Defects on the Borders of Silicon Bonded Wafers

Tereshchenko, A. N.; Штейнман, Э. А.; Мазилкин, А. А.; Khorosheva, Мaria; Kononchuk, Oleg

doi:10.17073/1609-3577-2014-2-143-147

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

2015

DOI: 10.17073/1609-3577-2014-2-143-147

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Structures and Electronic Properties of Defects on the Borders of Silicon Bonded Wafers

A. N. Tereshchenko¹,

Э. А. Штейнман²,

А. А. Мазилкин³

et al.

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Structures and Electronic Properties of Defects on the Borders of Silicon Bonded Wafers

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