Structured light for ultrafast laser micro- and nanoprocessing
Daniel Flamm,
Daniel Günther Grossmann,
Marc Sailer
et al.
Abstract:The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of novel laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near infrared down to the deep ultraviolet, e.g., based on… Show more
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