Structured illumination assisted microdeflectometry with optical depth scanning capability

Lu, Sheng; Hua, Hong

doi:10.1364/ol.41.004114

Cited by 10 publications

(3 citation statements)

References 13 publications

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“…The optical path of a typical point-scanning chromatic confocal system is shown in Figure 1. The complex-color light emitted by the light source containing multiple wavelengths arrives at the dispersive objective after passing through the beam-splitter, and after passing through the dispersive objective, the light of different wavelengths will be focused at different axial positions, resulting in a dispersive spectral 5,6 . Only light focused on the surface of the sample is reflected by the sample back into the collection optical path.…”

Section: Point-scanning Chromatic Confocal Systemmentioning

confidence: 99%

Design and analysis of high-resolution confocal measurement systems

Wang,

Ru,

Zhu

2024

International Conference on Optics and Machine Vision (ICOMV 2024)

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With the wide application of large-diameter optical components, the measurement efficiency of single-point chromatic confocal system is very low, which cannot complete the detection of surface defects of large-diameter optical components efficiently. Line-scanning chromatic confocal technology has been widely used because of its ability to achieve fast and low time-consuming measurements. This study designs and analyzes a line-scanning confocal system for optical component defects based on the principle of chromatic confocal. Firstly, the basic principle of the line-scanning chromatic confocal system is elaborated; secondly, the dispersive objective in the measurement system are designed, enables the system to realize high-precision, wide-range measurements; the theoretical analysis results show that the axial resolution of the system can reach 0.5 μm, which provides certain technical support for the detection of defects on the surface of sub-micron optical components.

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Section: Point-scanning Chromatic Confocal Systemmentioning

confidence: 99%

Design and analysis of high-resolution confocal measurement systems

Wang,

Ru,

Zhu

2024

International Conference on Optics and Machine Vision (ICOMV 2024)

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“…As a result, moiré techniques are now largely obsolete in DM, and can in hindsight be interpreted as a complicated way (but necessary at the time) to reduce uncertainties. Some work has also been dedicated to microscopic applications of deflectometry (Krasinski et al, 1985;Bitte, 2002;Bothe et al, 2007;Häusler et al, 2008;Huang et al, 2013a;Lu and Hua, 2016;Gu et al, 2021;Gu et al, 2022), but it appears that these have not displaced the sensitive and semi-quantitative methods that have been previously in use.…”

Section: Historical Overviewmentioning

confidence: 99%

Deflectometry for specular surfaces: an overview

et al. 2023

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Deflectometry as a technique to assess reflective surfaces has now existed for some 40 years. Its different aspects and variations have been studied in multiple theses and research articles; reviews are available for certain subtopics. Still a field of active development with many unsolved problems, deflectometry now encompasses a large variety of application domains, hardware setup types, and processing workflows for different purposes, and spans a range from qualitative defect inspection of large vehicles to precision measurements of microscopic optics. Over these years, many exciting developments have accumulated in the underlying theory, in the systems design, and in the implementation specifics. This diversity of topics is difficult to grasp for experts and non-experts alike and may present an obstacle to a wider acceptance of deflectometry as a useful tool for research and industrial applications. This paper presents an attempt to summarize the status of deflectometry and to map relations between its notable branches. Its aim is to provide a communication basis for experienced practitioners and also to offer a convenient entry point for those interested in learning about the method. The list of references introduces some prominent trends and established research groups in order to facilitate further self-directed exploration.

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“…The deflectometry has been successfully applied to test the spherical mirrors, aspheric mirrors and precision X-ray mirrors, etc., with the accuracy comparable with the interferometry. Besides, various micro-deflectometric systems have also been proposed for the microscopic measurement [15][16][17][18], which are traditionally based on phase-shifting fringe projection method. The phase-shifting method is time consuming and not suitable for transient measurement.…”

Section: Introductionmentioning

confidence: 99%

Transient microscopic testing method based on deflectometry

Wang

Xie

et al. 2019

Optical Design and Testing IX

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The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

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Structured illumination assisted microdeflectometry with optical depth scanning capability

Cited by 10 publications

References 13 publications

Design and analysis of high-resolution confocal measurement systems

Design and analysis of high-resolution confocal measurement systems

Deflectometry for specular surfaces: an overview

Transient microscopic testing method based on deflectometry

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