Structure of Ultra-Thin Diamond-Like Carbon Films Grown with Filtered Cathodic Arc on Si(001)

Herrera-Gómez, Alberto; Sun, Yan; Aguirre-Tostado, F. S.; Hwang, Chul Ju; Mani-González, P.G.; Flint, Eric M.; Espinosa‐Magaña, F.; Wallace, Robert M.

doi:10.2116/analsci.26.267

Cited by 21 publications

(18 citation statements)

References 14 publications

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“…2(b)) has primary peaks at 284.4 eV and 285.3 eV corresponding to sp 2 and sp 3 bonded carbon, respectively, and a secondary peak at 286.5 eV, attributed to C-O contamination, due to air exposure. The peak fits match well with similar studies in literature [35][36][37][38] and show a significant sp 3 bonding fraction (around 76% of C1s spectrum area). Comparing the reference ta-C (Fig.…”

Section: Resultssupporting

confidence: 90%

“…2(a)) was fitted with an asymmetric Doniach-Sunjic 33 profile after removal of Shirley background, to fit conductive sp 2 bonded carbon due to its semi-metallic behavior 34 and a Gaussian component. The Doniach-Sunjic fit peak at 284.4 eV is identified as sp 2 bonded carbon [35][36][37][38] and the uncoated SWCNTN has a dominant sp 2 carbon bonding fraction (around 82% of C1s spectrum area). The Gaussian component at 285.5 eV is attributed to defects in the nanotube structure as shown in literature 39,40 and minor surface contamination.…”

Section: Resultsmentioning

confidence: 99%

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Conditions for forming composite carbon nanotube-diamond like carbon material that retain the good properties of both materials

Ren

Iyer

Koskinen

et al. 2015

Journal of Applied Physics

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Gold nanoparticle formation in diamond-like carbon using two different methods: Gold ion implantation and codeposition of gold and carbon J. Appl. Phys. 112, 074312 (2012) Carbon nanotubes are of wide interest due to their excellent properties such as tensile strength and electrical and thermal conductivity, but are not, when placed alone on a substrate, well resistant to mechanical wear. Diamond-like carbon (DLC), on the other hand, is widely used in applications due to its very good wear resistance. Combining the two materials could provide a very durable pure carbon nanomaterial enabling to benefit from the best properties of both carbon allotropes. However, the synthesis of high-quality diamond-like carbon uses energetic plasmas, which can damage the nanotubes. From previous works it is neither clear whether the quality of the tubes remains good after DLC deposition, nor whether the DLC above the tubes retains the high sp 3 bonding fraction. In this work, we use experiments and classical molecular dynamics simulations to study the mechanisms of DLC formation on various carbon nanotube compositions. The results show that high-sp 3 -content DLC can be formed provided the deposition conditions allow for sidewards pressure to form from a substrate close beneath the tubes. Under optimal DLC formation energies of around 40-70 eV, the top two nanotube atom layers are fully destroyed by the plasma deposition, but layers below this can retain their structural integrity. V C 2015 AIP Publishing LLC.

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Section: Resultssupporting

confidence: 90%

Section: Resultsmentioning

confidence: 99%

Conditions for forming composite carbon nanotube-diamond like carbon material that retain the good properties of both materials

Ren

Iyer

Koskinen

et al. 2015

Journal of Applied Physics

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“…There is a secondary peak at 286.5 eV, attributed to C-O contamination, due to air exposure. The peak fits match well with similar studies in literature [39][40][41][42] and show significant sp 3 bonding fraction (around 75% of C1s spectrum area).…”

Section: Xpssupporting

confidence: 90%

“…6(a)) was fitted with an asymmetric Doniach-Sunjic 37 profile, to fit conductive sp 2 bonded carbon due to its semi-metallic behavior 38 and a Gaussian component. The Doniach-Sunjic fit peak at 284.4 eV is identified as sp 2 bonded carbon [39][40][41][42] and the uncoated SWCNTN has dominant sp 2 carbon bonding fraction (around 82% of C1s spectrum area). The Gaussian FIG.…”

Section: Xpsmentioning

confidence: 99%

“…6(b)-6(d)) as the oxygen plasma etches sp 2 bonded carbon faster than sp 3 bonded carbon. 29 The OPT process removes the few atom thick layer of sp 2 carbon which forms at the top of ta-C coating as part of deposition process 41,45,46 and also reduces sp 2 bonded carbon content in the ta-C coating itself, making it richer in sp 3 bonded carbon. 29,46,47 From the XPS elemental analysis (Refer supplemental Fig.…”

Section: Xpsmentioning

confidence: 99%

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Single walled carbon nanotube network—Tetrahedral amorphous carbon composite film

Iyer

Kaskela

Johansson

et al. 2015

Journal of Applied Physics

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Articles you may be interested inEffect of tetrahedral amorphous carbon coating on the resistivity and wear of single-walled carbon nanotube network J. Appl. Phys. 119, 185306 (2016) Single walled carbon nanotube network (SWCNTN) was coated by tetrahedral amorphous carbon (ta-C) using a pulsed Filtered Cathodic Vacuum Arc system to form a SWCNTN-ta-C composite film. The effects of SWCNTN areal coverage density and ta-C coating thickness on the composite film properties were investigated. X-Ray photoelectron spectroscopy measurements prove the presence of high quality sp 3 bonded ta-C coating on the SWCNTN. Raman spectroscopy suggests that the single wall carbon nanotubes (SWCNTs) forming the network survived encapsulation in the ta-C coating. Nano-mechanical testing suggests that the ta-C coated SWCNTN has superior wear performance compared to uncoated SWCNTN. V C 2015 AIP Publishing LLC.

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Nanotribological performance of fullerene-like carbon nitride films

Flores-Ruiz

Enriquez-Flores

Chiñas‐Castillo

et al. 2014

Applied Surface Science

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Structure of Ultra-Thin Diamond-Like Carbon Films Grown with Filtered Cathodic Arc on Si(001)

Cited by 21 publications

References 14 publications

Conditions for forming composite carbon nanotube-diamond like carbon material that retain the good properties of both materials

Conditions for forming composite carbon nanotube-diamond like carbon material that retain the good properties of both materials

Single walled carbon nanotube network—Tetrahedral amorphous carbon composite film

Nanotribological performance of fullerene-like carbon nitride films

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