Structure of the silver containing diamond like carbon films: Study by multiwavelength Raman spectroscopy and XRD

A ternary phase diagram for amorphous carbon

“…Migration paths of a-C:H samples doped with B, N, I, Si, Ag, and Ti elements [21,30,[46][47][48][49][50][51] are shown in Fig. 14(a), and that of a-C:H samples irradiated with He + , N + , and Ag + ions [52][53][54] in Fig.…”

Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films

“…In most cases the D/G ratio decreases with increase of ion beam energy (except measured at 442 nm and 633 nm excitation). One should keep in mind that D/G ratio decreases with the increase of sp 3 /sp 2 ratio [8]. Pure hydrogenated amorphous carbon films probed with 785 nm wavelength excitation had also decreasing tendency of D/G ratio [42].…”

“…In the case of a-C:H films the drawback of visible light excitation is photoluminescence background which is superimposed to Raman scattering spectra [27]. Furthermore it is not possible to register directly sp 3 bonded carbon, because visible Raman spectroscopy is 50-230 times more sensitive to sp 2 sites [8]. To overcome these drawbacks one can choose UV excitation source or measure with different wavelengths and determine the dispersion of G peak (Disp(G)).…”

“…Raman spectroscopy can be used to analyze the modified DLC films in order to find out the influence of doping elements on the structure of DLC. There are only few studies on multiwavelength spectroscopy of diamond like carbon films containing chemical elements other than carbon and hydrogen [8].…”

“…The main disadvantage of DLC films is its high compressive stress resulting in film delamination and limited film thickness. To overcome these limitations, metal containing DLC films were formed [8][9][10][11]. Such films usually are formed by rf sputtering or magnetron sputtering of graphite/ metal target (films without hydrogen) [12] or sputtering of metal target in hydrocarbon gasses (hydrogenated films) [11,13].…”