Atomistic mechanisms of nanoindentation of a-SiC have been studied by molecular dynamics simulations. The load displacement curve exhibits a series of load drops, reflecting the short-range topological order similar to crystalline 3C-SiC. In contrast to 3C-SiC, the load drops are irregularly spaced and less pronounced. The damage is spatially more extended than in 3C-SiC, and it exhibits long-range oscillations consistent with the indenter size. Hardness is ϳ60% lower than in 3C-SiC and is in agreement with experiment. The onset of plastic deformation occurs at depth ϳ75% lower than in 3C-SiC. © 2005 American Institute of Physics. [DOI: 10.1063/1.1849843] Nanoindentation is widely used to study mechanical properties of materials at the nanometer scale. [1][2][3][4] In crystalline solids, many experimental 5 and theoretical 6,7 studies show that the nanoindentation load-displacement ͑P -h͒ curve is correlated with the nucleation of subsurface defects in crystalline solids. For example, a molecular dynamics (MD) simulation has shown 8 that nucleation and coalescence of dislocations under an indenter lead to amorphization.Amorphous materials lack a long-range order of topological network and hence there is no clear notion of dislocations. For this reason, understanding atomistic processes during nanoindentation in amorphous materials presents a great challenge. MD simulations provide trajectories of all the atoms and are expected to shed light on the question of deformations in amorphous materials. The short-and medium-range topology of a-SiC has been studied by MD simulations.
9In this Letter, we study nanoindentation-induced deformations of amorphous silicon carbide ͑a-SiC͒ by means of MD. The maximum indentation pressure of 30 GPa is consistent with experimental values of hardness for a-SiC (Ref. 10) and is only ϳ40% of that in a zinc-blende crystalline 3C-SiC. 8 The indentation damage is spatially less localized in comparison with 3C-SiC. The onset of plasticity occurs at a depth only 25% of that in 3C-SiC. The P -h curve in a -SiC exhibits a series of load drops in the plastic regime. The magnitudes of load drops are less than in 3C-SiC due to less accumulated pressure under the indenter. The load drops are related to changes in structural correlations, which are analyzed through local rearrangements of atoms, local pressure and shear stress distribution, and bond-angle distribution.The interatomic potential used here consists of two-and three-body terms, which include steric repulsion, charge transfer, electronic polarizability, van der Waals interaction, and covalent bonding effects. The calculated lattice constant, melting temperature, elastic constants, and cohesive energy are in good agreement with experiments. 11 This potential has been used also to predict a new mechanism for a reversible zinc-blende-to-rocksalt transformation of SiC under pressure, 12 which was later confirmed by first-principles calculations. 13 We start from a perfect zinc-blende bulk ͑N = 1 048 320 atoms͒ at the experimental SiC ...