2024
DOI: 10.1117/1.jmm.23.2.024602
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Structure effects of silicon-containing antireflection coatings

Peng Dong,
Ying Lu,
Tianhao Li
et al.

Abstract: A silicon containing antireflection coating (SiARC) can effectively suppress standing waves when the photoresist thickness is limited, but the relationship between polymer structures and optical parameters is not clear. High-silicon-content polysiloxanes were synthesized by sol-gel processing, and SiARC was prepared by spin-coating method. The influence of Si/Ph on the optical parameters (n and k values) of SiARC was investigated. Finally, the effect of silicon content on the etching rate of fluorine ion and o… Show more

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