Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter

Jianfei, 张建飞 Zhang; Xu-ye, 庄须叶 Zhuang; Weimin, 汪为民 Wang; Fenggang, 陶逢刚 Tao; Jun, 姚军 Yao

doi:10.3788/aos201232.0822005

光学学报

2012

DOI: 10.3788/aos201232.0822005

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Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter

张建飞 Zhang Jianfei¹,

庄须叶 Zhuang Xu-ye²,

汪为民 Wang Weimin³

et al.

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Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter

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