7th Joint MMM-Intermag Conference. Abstracts (Cat. No.98CH36275) 1998
DOI: 10.1109/intmag.1998.742126
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Structure and soft magnetic properties of sputter deposited MnZn ferrite films

Abstract: In this paper we report the soft magnetic properties of thin films of sputtered MnZn ferrite deposited on thermally oxidized Si substrates. A high deposition temperature, 600°C, together with the addition of water vapor to the sputtering gas was found to improve the initial ac permeability, . The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalline Zn-ferrite substrate, a of 100 was obtained. The results are discussed i… Show more

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“…In addition, sodium hydroxide solution is often used, particularly in coprecipitation and hydrothermal processes, resulting in introduction of slight amount of Na impurity in ZMFO. For fabricating ZMFO thin films, physical vapor deposition techniques, such as sputtering 19 and pulsed laser deposition, 20 are widely used. Even though they are capable of growing phase‐pure ZMFO films with high density, they are generally complex in implementation, costly in instrumentation owing to the delicate electronic and high‐vacuum systems, as well as less amenable to doping in general.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, sodium hydroxide solution is often used, particularly in coprecipitation and hydrothermal processes, resulting in introduction of slight amount of Na impurity in ZMFO. For fabricating ZMFO thin films, physical vapor deposition techniques, such as sputtering 19 and pulsed laser deposition, 20 are widely used. Even though they are capable of growing phase‐pure ZMFO films with high density, they are generally complex in implementation, costly in instrumentation owing to the delicate electronic and high‐vacuum systems, as well as less amenable to doping in general.…”
Section: Introductionmentioning
confidence: 99%