2011
DOI: 10.1016/j.surfcoat.2011.09.061
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Structure and properties of Ti–Al–Y–N coatings deposited from filtered vacuum-arc plasma

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Cited by 29 publications
(10 citation statements)
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“…Similar changes were previously observed for coatings with a NaCl type structure, which are deposited under ion bombardment conditions. For example, in vacuum-arc coatings TiN, (Ti, Al)N, (Ti, Cr)N, which are deposited from a highly ionized stream of filtered vacuum-arc plasma, with an increase in the amplitude of the pulse bias potential, the orientation of the grains of cubic nitride changes from (111) to (220), and then to (200), which is accompanied by a decrease in the level of residual compressive stresses [18][19][20][21]. Changes are considered as a result of competition between the processes of the appearance and annealing of point defects in the thermal peaks of bombarding ions, which are aimed at minimizing the free energy of the system [22].…”
Section: Fig 6 -Effect Of the Bias Potential On The Crystal Lattice mentioning
confidence: 99%
“…Similar changes were previously observed for coatings with a NaCl type structure, which are deposited under ion bombardment conditions. For example, in vacuum-arc coatings TiN, (Ti, Al)N, (Ti, Cr)N, which are deposited from a highly ionized stream of filtered vacuum-arc plasma, with an increase in the amplitude of the pulse bias potential, the orientation of the grains of cubic nitride changes from (111) to (220), and then to (200), which is accompanied by a decrease in the level of residual compressive stresses [18][19][20][21]. Changes are considered as a result of competition between the processes of the appearance and annealing of point defects in the thermal peaks of bombarding ions, which are aimed at minimizing the free energy of the system [22].…”
Section: Fig 6 -Effect Of the Bias Potential On The Crystal Lattice mentioning
confidence: 99%
“…Recent research has shown that surface treatment can introduce the right amount of reactive yttrium (Y) content into nitride hard films, thereby improving their hardness, adsorption capacity, and resistance to high-temperature oxidation. Additionally, rare earth elements possess a surface purification effect that facilitates the adsorption, deposition, and diffusion of atoms in coatings, reducing deposition times [6][7][8][9]. Moser et al [10,11] found that Y doping enhances the hardness and thermal stability of TiAlN films through solid solution strengthening.…”
Section: Introductionmentioning
confidence: 99%
“…The aforementioned studies indicate that the addition of an appropriate amount of a rare earth element can substantially improve the hardness and oxidation resistance of nitride films. Y is an ideal doping element for high-temperature cutting coatings [15,16].…”
Section: Introductionmentioning
confidence: 99%
“…19,20 This technique utilizes the cathode vacuum arc discharge and produces high density metal plasma. 24,25 By means of magnetic lter technique, we can obtain homogeneous metal plasma. In order to obtain high quality thin lm, these macroparticles must be removed.…”
Section: Introductionmentioning
confidence: 99%
“…Metal plasma will move along the direction of magnetic eld and reach the vacuum chamber, however the macroparticles won't. 24,25 By means of magnetic lter technique, we can obtain homogeneous metal plasma. Finally, the metal plasma will be deposited on the CP in vacuum chamber in a very short time.…”
Section: Introductionmentioning
confidence: 99%