2019
DOI: 10.1007/978-981-13-6133-3_3
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Structure and Properties of Combined Multilayer Coatings Based on Alternative Triple Nitride and Binary Metallic Layers

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“…The substrate holder (5) was mounted on a rotating stainless steel plate (300×300 mm) on which the substrates (6) were placed. BULAT-6 was also equipped with DC voltage source (7), the value of which can be varied between 5 and 1000 V, and high-voltage impulse generator (8) with adjustable voltage pulse amplitude of 0.5-2 kV and repetition frequency of 5-7 kHz [7][8][9].…”
Section: Materials and Methods Of The Experimentsmentioning
confidence: 99%
“…The substrate holder (5) was mounted on a rotating stainless steel plate (300×300 mm) on which the substrates (6) were placed. BULAT-6 was also equipped with DC voltage source (7), the value of which can be varied between 5 and 1000 V, and high-voltage impulse generator (8) with adjustable voltage pulse amplitude of 0.5-2 kV and repetition frequency of 5-7 kHz [7][8][9].…”
Section: Materials and Methods Of The Experimentsmentioning
confidence: 99%