2011
DOI: 10.1016/j.apsusc.2011.03.083
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Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering

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Cited by 77 publications
(24 citation statements)
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“…133 Films were synthesized using a AlCrMnMoNiZrB 0.1 target. The N 2 : Ar flow rate ratio (R N ) was varied from 0 to 1.0.…”
Section: Iii2 Methods For Preparation Of Nitride Coatings Based On mentioning
confidence: 99%
See 1 more Smart Citation
“…133 Films were synthesized using a AlCrMnMoNiZrB 0.1 target. The N 2 : Ar flow rate ratio (R N ) was varied from 0 to 1.0.…”
Section: Iii2 Methods For Preparation Of Nitride Coatings Based On mentioning
confidence: 99%
“…Diffraction patterns of (AlCrMnMoNiZrB0.1)N films prepared at different RN values 133. RN = 0 Photomicrographs of (AlCrMnMoNiZrB0.1)N coatings deposited on silicon substrate at RN = 0 (a), 0.5 (b), 1.0 (c) illustrating changes in the morphology (on the left) and the structure (on the right) 133.…”
mentioning
confidence: 99%
“…In addition to the above-mentioned unique structural and compositional characteristics, HEAs possess promising mechanical, magnetic and electrochemical properties, such as high hardness, high strength, high thermal stability, excellent wear resistance and outstanding oxidation resistance [11][12][13][14][15][16][17], etc. In the literature, various experimental techniques have been utilized to prepare HEAs, e.g., arc-melting [11,18], copper mold casting [14], mold-clamp casting [19], fluxed water quenching [20], melt spinning [21], injection casting [22], induction melting [23], mechanical alloying (MA) [24], reactive DC sputtering [25] and laser cladding [26], etc. However, review of the literature shows that casting is the most widely used method for processing HEAs, especially copper mold casting and arc-melting.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, great efforts have been focused on HEA films prepared by the magnetron sputtering method, such as, TiVCrAlZrN x [7], (TiVCrZrHf)N [8], (AlCrMoTaTi)N [9], FeCoNiCuVZrAl [10], etc. It has been shown that these HEA films display many advantages in terms of both mechanical and physical properties, high hardness and wear resistance [11][12][13], high resistance to corrosion [14], and oxidation [15], and excellent thermal stability especially when used as diffusion barriers in copper metallization [16][17][18][19]. It is well-known that transition metal nitride coatings usually show high hardness, good thermal stability, and excellent wear resistance properties, which make them widely used as protective coatings in mechanical cutting tools at high temperatures.…”
Section: Introductionmentioning
confidence: 99%