Abstract:X-ray diffractometry in a hard region (l~0.154 nm) was used to study the phase structure, composition and construction of W/Si multilayer X-ray mirrors (MXMs) with thicknesses of tW<10 nm for tungsten layers obtained by direct-current magnetron sputtering. Two series of samples were fabricated with different tungsten deposition rates, which differ approximately by a factor of 4: ~0.60 nm/s and ~0.15 nm/s. It is shown that tungsten layers have a polycrystalline (BCC) structure at thicknesses tW>2.7 nm, an… Show more
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