Structure and optical properties of Nb2O5 sculptured thin films by glancing angle deposition

Xiao, Xiudi; Dong, Guoping; Xu, Cheng; He, Hongbo; Hu, Qi; Fan, Zhengxiu; Shao, Jianda

doi:10.1016/j.apsusc.2008.07.071

Cited by 62 publications

(24 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Also, the Nb 2 O 5 thin films have the properties of high refractive index, low extinction coefficient, and high transparent ratio in the UV-vis-NIR (ultraviolet-visible near-infrared) region [12,13]. The properties of Nb 2 O 5 thin films closely rely on the sputtered materials, deposition techniques, deposition parameters, and the thicknesses of thin films.…”

Section: Introductionmentioning

confidence: 99%

“…The second novelty is that the O 2 flow rate has a large effect on the properties of Nb 2 O 5 thin films; only a few studies focused on the effect of the O 2 flow rate on that topic. In the past, the Nb 2 O 5 thin films had been investigated by different methods, for example by the microwave-assisted reactive magnetron sputtering process [6], by the glancing angle deposition process [12], by the sol-gel dip coating technique [13], by the sol-gel and evaporation-induced self-assembly method [14], by radio frequency (RF) magnetron sputtering [16], and by a low frequency reactive magnetron sputtering system [19], respectively. In the past, as the physical plasma method was used to deposit the Nb 2 O 5 thin films, no reports were focused on the effect of the O 2 flow rate in the (O 2 + Ar) mixing atmosphere on the properties’ extinction coefficient, optical band gap ( E g ) values, and refractive index.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters

et al. 2016

View full text Add to dashboard Cite

In this study, Nb2O5 ceramic was used as the target to deposit the Nb2O5 thin films on glass substrates with the radio frequency (RF) magnetron sputtering method. Different deposition temperatures and O2 ratios were used as parameters to investigate the optical properties of Nb2O5 thin films. The deposition parameters were a pressure of 5 × 10−3 Torr, a deposition power of 100 W, a deposition time of 30 min, an O2 ratio (O2/(O2 + Ar), in sccm) of 10% and 20%, and deposition temperatures of room temperature (RT), 200, 300 and 400 °C, respectively. We found that even if the deposition temperature was 400 °C, the deposited Nb2O5 thin films revealed an amorphous phase and no crystallization phase was observed. The optical properties of transmittance of Nb2O5 thin films deposited on glass substrates were determined by using a ultraviolet-visible (UV-vis) spectrophotometer (transmittance) and reflectance spectra transmittance (reflectance, refractive index, and extinction coefficient) in the light wavelength range of 250–1000 nm. When the O2 ratio was 10% and the deposition temperature increased from RT to 200 °C, the red-shift was clearly observed in the transmittance curve and the transmission ratio had no apparent change with the increasing deposition temperature. When the O2 ratio was 20%, the red-shift was not observed in the transmittance curve and the transmission ratio apparently decreased with the increasing deposition temperature. The variations in the optical band gap (Eg) values of Nb2O5 thin films were evaluated from the Tauc plot by using the quantity hν (the photon energy) on the abscissa and the quantity (αhν)r on the ordinate, where α is the optical absorption coefficient, c is the constant for direct transition, h is Planck’s constant, ν is the frequency of the incident photon, and the exponent r denotes the nature of the transition. As the O2 ratio of 10% or 20% was used as the deposition atmosphere, the measured Eg values decreased with the increase of the deposition temperature. The reflectance ratio, extinction coefficient, and refractive index curves of Nb2O5 thin films were also investigated in this study. We would show that those results were influenced by the deposition temperature and O2 ratio.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters

et al. 2016

View full text Add to dashboard Cite

show abstract

“…Recently, this material has also been appointed as a substitute of tantalum pentoxide (İ' = 27) for application in solid state capacitors [10]. Nb 2 O 5 is also one of the useful optical materials for its desirable properties, such as stability in air and water, resistance to acid and base, high refractive index (n = 2.4 at 550 nm), low absorption and high transparency in the UV-vis-NIR region [11]. It has been widely used in, for example, intelligent windows [12], solar cell [13], chemical sensor [14], etc.…”

Section: Introductionmentioning

confidence: 99%

Analysis of substrate type and thickness influence on wettability of Nb2O5 thin films

Mazur

Song

Domaradzki

et al. 2011

2011 International Students and Young Scientists Workshop "Photonics and Microsystems"

View full text Add to dashboard Cite

For the purpose of this paper Nb 2 O 5 thin films were manufactured by microwave-assisted reactive magnetron sputtering. Nb 2 O 5 thin films with different thickness were deposited on standard microscope slides, SiO 2 and silicon substrates. Wettability and optical properties of manufactured coatings were investigated. Knowledge of the macroscopic contact angle for materials allows to predict whether a liquid droplet will bead up on or spread out over a solid surface. In this paper contact angle, critical surface tension and surface free energy of Nb 2 O 5 thin films with thickness of 565, 300, 200, 100 and 50 nm were investigated. Measurements of surface free energy and contact angle was carried out with a computer controlled goniometer system with water, ethylene glycol and diiodomethane. Contact angle measurements were performed according to the sessile drop method. The results have shown that all manufactured Nb 2 O 5 thin films had the water contact angle of about 90 degrees. There was no difference in wettability for thin films with different thickness and deposited on different substrates. Also optical properties of deposited thin films were compared. Transmittance spectra of Nb 2 O 5 thin films were measured using Hitachi U-3501 spectrophotometer. Based on transmittance and reflectance spectra, measured with the aid of Aquila nkd-8000 instrumentation, thickness, refractive index and extinction coefficient of Nb 2 O 5 thin films were calculated using Drude -Lorentz model. Transparency in visible light range of deposited thin films varied from about 70 % up to 80 %. Refractive index and extinction coefficient were 2.32 and 4.55⋅ ⋅ ⋅ ⋅10 -5 , respectively.

show abstract

“…Niobium pentaoxide (Nb 2 O 5 ) has many attractive properties, such as good chemical stability, low film stress, and a high refractive index [5,6]. Owing to these properties, Nb 2 O 5 has applications in many fields such as catalysts, biocompatible materials [7], electrochromic coatings [8,9], batteries [10] and solar cells [11,12].…”

Section: Introductionmentioning

confidence: 99%

Hydrogen sensing properties of multiple networked Nb2O5/ZnO core–shell nanorod sensors

Park

Lee

et al. 2014

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

Structure and optical properties of Nb2O5 sculptured thin films by glancing angle deposition

Cited by 62 publications

References 19 publications

Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters

Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters

Analysis of substrate type and thickness influence on wettability of Nb2O5 thin films

Hydrogen sensing properties of multiple networked Nb2O5/ZnO core–shell nanorod sensors

Contact Info

Product

Resources

About