Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering

Saladukhin, I.A.; Abadias, G.; Michel, A.; Углов, В.В.; Zlotski, S.V.; Dub, S. N.; Tolmachova, G.N.

doi:10.1016/j.tsf.2014.11.020

Cited by 19 publications

(6 citation statements)

References 35 publications

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“…The measurement of the variations in the mass analysed for the two substrates with and without coating was carried out according to the method proposed by the ASTM G1 standard. 200), (220), and (222), respectively, corresponding to the formation of the solid solution (Ti, Zr) N, which agrees with other investigations [14][15][16]. Figure 3(b) shows the XRD analysis of the Ti-Zr-Si-N coatings deposited on the Ti6Al4V alloy.…”

Section: Materials and Solutionssupporting

confidence: 86%

Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

Cárdenas

Olaya

2019

Corrosion Engineering, Science and Technology

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We present a study of the synthesis and an evaluation of the corrosion resistance of Ti-Zr-Si-N coatings deposited by means of the co-sputtering technique on 316L steel and Ti6Al4V alloy substrates. The thin films were obtained using Ti 5 Si 2 and Zr targets with 99.9% purity for the deposition, and a power of 200 W was applied in the DC source and 170 W in the RF source. The corrosion resistance was evaluated via the cyclic oxidation test with consistent cycles of 1 hour of cooling, 1 hour of heating, and 16 minutes of stabilisation for 300 cycles at a temperature of 600°. The coatings were characterised by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and confocal laser microscopy. The coating was effective up to 150 cycles for the case of 316L steel, and up to 50 cycles for the Ti6AlV alloy.

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Section: Materials and Solutionssupporting

confidence: 86%

Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

Cárdenas

Olaya

2019

Corrosion Engineering, Science and Technology

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“…Figure 2 shows the diffractograms obtained for the different deposition conditions on the Ti6Al4V substrate, with variations in power and temperature. Peaks are observed at positions 2ϴ 35,125° 39,954°, 58,975° and 75,215° corresponding to the formation of the solid solution (Ti, Zr) N, which is in agreement with other research (Pogrebnjak, et al, 2012;Saladukhin, et al, 2015;Sobol, et al, 2011). Diffraction peaks increase or decrease in intensity depending on the value of the variation in the power of the RF source at 130W (a), 150W (b) and 170W (c), and on the coating deposition room temperature, 130°C and 260°C.…”

Section: Resultssupporting

confidence: 92%

“…The addition of Si to (Ti, Zr)N films is considered a prospect for its improvement in hardness with values up to 29GPa (Saladukhin, et al, 2015) for certain silicon contents, as well as the improvement of oxidation and wear resistance. According to Uglov, et al (2015), the increase in Si content results in the transformation of the nanocrystalline structure into a nanocomposite state with a grade size of 11nm to 5nm.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of nanostructured (Ti-Zr-Si)N coatings deposited on Ti6Al4V alloy

CárdenasFlechas

Mejía-Villagrán

Joya

et al. 2021

Rev. Acad. Colomb. Cienc. Ex. Fis. Nat.

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d Zr targets. The synthesis of the coatings was carried out by varying the discharge power in the Ti5 well as a variation in the deposit temperature at room temperature 130° and 260°C. The coatings were characterized by means of X-ray diffraction (XRD), evidencing the formation of the phase that belongs to the solid solution (Zr, Ti)N, scanning electron microscopy (SEM), UV-Vis spectroscopy and hardness and pin-on-disc tests. The thickness was measured through interferometry with values between 662 and 481nm for the deposited coatings. According to the failure mechanism in the scratch test, the best results were obtained with a power of 170W and 260°C with a cohesive failure Lc1 = 2.1N and an adhesive failure Lc2 = 4.7N.

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“…Researches on quaternary coatings, doping the non-metallic elements such as carbon or boron on the ternary coating, have been actively conducted to overcome this limitation. 3,4 As part of these researches, we studied carbon doping using laser carburization to improve the mechanical properties of the surface while maintaining adhesion and thermal stability of TiZrN coating. [5][6][7] Efforts have been made to identify the mechanisms.…”

Section: Introductionmentioning

confidence: 99%

“…Among ternary titanium‐based nitrides, TiZrN has high hardness and thermal stability, but it has relatively low hardness and wear resistance compared to diamond‐like carbons. Researches on quaternary coatings, doping the non‐metallic elements such as carbon or boron on the ternary coating, have been actively conducted to overcome this limitation 3,4 . As part of these researches, we studied carbon doping using laser carburization to improve the mechanical properties of the surface while maintaining adhesion and thermal stability of TiZrN coating 5‐7 .…”

Section: Introductionmentioning

confidence: 99%

Carbon depth profile and internal stress by thermal energy variation in carbon‐doped TiZrN coating

Hong

Kim

et al. 2020

J. Am. Ceram. Soc.

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Diffusion and bonding behavior of the doped carbon by variation of thermal energy was investigated in terms of carbon depth profile and local atomic structure. The thermal energy of pulsed laser was limited to the range of 20%~50% to dope the carbon and prevent degradation of the coating layer with laser carburization. The doped carbon was confirmed to be distributed to a depth of around 20 nm from the surface at 20% thermal energy by ToF-SIMS analysis. Carbon diffused at about 400 nm with 50% thermal energy, and most of the carbon spread from the surface to around 80 nm. The EXAFS analysis represented that the peak of the interstitial carbon site was formed at 20% and the ZrN peak shifted toward the ZrC peak by increasing the thermal energy. The analysis of the electronic structure and the bonding state demonstrated that the proportion of substitutional carbon was about 21% at a thermal energy of 50%. The internal stress was calculated using HR-XRD with a 5-axes sample stage, which was −453 MPa before doping and then increased to −1494 MPa at 50% because the mixture of interstitial and substitutional carbon increased distortion inside the coating layer. The elastic modulus and hardness were 459 and 37.9 GPa at 50%, respectively, which were improved by 10% and 20% compared to those of the TiZrN coating.

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Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering

Cited by 19 publications

References 35 publications

Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

Synthesis of nanostructured (Ti-Zr-Si)N coatings deposited on Ti6Al4V alloy

Carbon depth profile and internal stress by thermal energy variation in carbon‐doped TiZrN coating

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