2006
DOI: 10.1007/s10582-006-0087-5
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Structure analysis of thin iron-silicide film from φ-scan RHEED Patterson function

Abstract: The atomic structure of thin iron silicide film, grown epitaxially on the Si(111) surface, has been analyzed by means of the three-dimensional RHEED Patterson function analysis. The iron-silicide-terminated surface with (2 × 2) periodicity has been prepared by a solidphase epitaxy method. 2 ML of Fe were deposited on the Si(111)-(7 × 7) surface and annealed at 500 • C. Three-dimensional Patterson function was calculated from series of φ-scanned RHEED intensity distributions converted to the k-space. The result… Show more

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Cited by 18 publications
(14 citation statements)
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“…Such a scan is complementary to stationary patterns in that it reveals the in-plane symmetry and orientation distribution inaccessible in stationary patterns which in turn provide information about the surface morphology and the out-of-plane orientation distribution. A detailed discussion of this comparatively rarely applied technique can be found elsewhere [5][6][7][8][9][10][11][12][13][14][15][16]. Longitudinal ðoÀ2yÞ XRD scans are recorded with an analyzer, while skew-geometry azimuthal ðfÞ XRD scans are taken with open detector.…”
Section: Methodsmentioning
confidence: 99%
“…Such a scan is complementary to stationary patterns in that it reveals the in-plane symmetry and orientation distribution inaccessible in stationary patterns which in turn provide information about the surface morphology and the out-of-plane orientation distribution. A detailed discussion of this comparatively rarely applied technique can be found elsewhere [5][6][7][8][9][10][11][12][13][14][15][16]. Longitudinal ðoÀ2yÞ XRD scans are recorded with an analyzer, while skew-geometry azimuthal ðfÞ XRD scans are taken with open detector.…”
Section: Methodsmentioning
confidence: 99%
“…[18][19][20][21][22][23][24][25][26][27][28][29][30] Some of them are surface metastable phases, which are not found in Fe-Si bulk system. 31,32 For the 1 × 1 phase, FeSi with a CsCl structure has been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…A 3D image of the reciprocal space, wherein the diffraction intensities are mapped with the scattering vector s = (s x , s y , s z ), can be reconstructed from hundreds of RHEED patterns obtained by a single azimuthal scan in accordance with the Weissenberg method [13,14]. The s x and s z axes are parallel to the [112] and [111] directions of the substrate, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…We then compared the results of the two different methods to better understand the mechanism of Fe silicide formation on the Si(111) surface. Crystal structure and morphology of the epitaxial films were investigated using SEM and Weissenberg RHEED [13,14] wherein the principle governing the Weissenberg camera for x-ray crystallography [15] were incorporated into RHEED in order to obtain a 3D reciprocal image. The crystal structure could be immediately determined from the 3D reciprocal image.…”
Section: Introductionmentioning
confidence: 99%