Articles you may be interested inEffect of SnO2 concentration on the tuning of optical and electrical properties of ZnO-SnO2 composite thin films Electrical and optical properties of transparent conducting In4+xSn3−2xSbxO12 thin films J. Appl. Phys. 110, 033702 (2011); 10.1063/1.3605552Structure-related optical properties of ( Pb , La ) ( Zr , Ti ) O 3 thin films on indium tin oxide∕quartz substrates Titanium oxide thin films were prepared by pulsed-laser deposition on LaAlO 3 single crystal substrate at 700°C. Pure anatase films are obtained at high oxygen pressure ͑10 −1 mbar͒, while the rutile phase is evidenced at low oxygen pressure ͑10 −5 mbar͒ despite a large oxygen deficiency ͑O / Ti= 1.75͒. From asymmetric x-ray diffraction measurements, the in-plane epitaxial relationships be0tween the substrate and the titanium oxide phases are highlighted. Optical constants ͑refractive index n and extinction coefficient k͒ were deduced from ellipsometric measurements. The optical band gap energies of the anatase and rutile films are found to be 3.4 and 3.3 eV, respectively. Since the nearly stoichiometric anatase films are resistive ͑Ͼ10 3 ⍀ cm͒, the large oxygen deficiency in rutile films leads to noticeable increase in the conductivity due to the Ti 3+ species, which supply electrons in the conduction band. At low temperature ͑T Ͻ 200 K͒ the resistivity of rutile films versus temperature may be explained by a variable range hopping mechanism based on both two or three dimensional electron transfer between the Ti 3+ and Ti 4+ species.