In this paper, we examine the correlation between thermal spray process parameters that affect the deposition rate and the residual stress buildup in HVOF metallic and cermet coatings. Parameters of interest including feed-rate, raster speed, and substrate temperature (controlled via external cooling means) were evaluated in the context of their effect on the stress evolution in gas fuel HVOF-sprayed coatings. The process variables investigated are intended to change the deposition rate and subsequently the local deposition temperature (T LD ) at the location of impact. The residual stress during the deposition tends to be more tensile with increased T LD , and this tendency is more significant when the change in T LD is produced by the feed rate. Compressive stresses result for lower T LD due to dominance of the peening effect. A systematic study of these effects was conducted for gas fuel HVOF-sprayed Ni-and WC-12%wt.Co-coatings. The Nicoatings represent the family of ductile metallic materials, whereas the WC-12%wt.Co-coatings represent the behavior of hard cermets. Both materials develop compressive stress at low T LD and change into tensile stress at high T LD by manipulation of deposition rate parameters. Extensions to other materials and HVOF processes are also presented to support the analysis.Keywords properties, HVOF Á processing, curvature measurements Á processing, particle velocity Á processing, substrate coating interaction Á processing Á residual stress Á testing, particle temperature