1999
DOI: 10.1016/s0040-6090(99)00174-1
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Structural transition of crystalline Y2O3 film on Si(111) with substrate temperature

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Cited by 64 publications
(26 citation statements)
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“…They correspond to the spin obit split between 3d 5/2 and 3d 3/2 of yttrium, respectively, and relate with Y-O bonding in pure Y 2 O 3 . 31,32 The O 1s spectra all show two oxygen bonding states with binding energies at $528.5 and $531.0 eV. The low-energy peak has an energy good consistent with the normal Y-O binding energy in Y 2 O 3 .…”
Section: Resultsmentioning
confidence: 59%
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“…They correspond to the spin obit split between 3d 5/2 and 3d 3/2 of yttrium, respectively, and relate with Y-O bonding in pure Y 2 O 3 . 31,32 The O 1s spectra all show two oxygen bonding states with binding energies at $528.5 and $531.0 eV. The low-energy peak has an energy good consistent with the normal Y-O binding energy in Y 2 O 3 .…”
Section: Resultsmentioning
confidence: 59%
“…This indicates that the quantity of oxygen binding with yttrium in the Y 2 O 3 NCs increases with Ta. 32 Surface elemental stoichiometries are determined from peak-area ratios after the data are corrected with the experimentally determined sensitivity factors. According to the XPS data, the surface atomic ratios of O/Y are calculated to be 14.672 (as-synthesized), 5.451 (800 C), 2.211 (900 C), 1.777 (1000 C), and 30.234 (900 C, in N 2 ), revealing the decreasing trend with increasing Ta.…”
Section: Resultsmentioning
confidence: 99%
“…It has also been observed that the value of dielectric constant decreases with the increase in zinc dopant concentration. The dielectric polarizability of Zn 2+ (1.7-2.5) is very low compared to yttrium ions (11)(12)(13)(14)(15); it might be a reason for the decrease of dielectric constant with the increase in dopant [43]. Hence, as the dopant concentration increases, more yttrium ions will be substituted by zinc ions and thereby decreasing the dielectric polarization, which in turn decreases the dielectric constant.…”
Section: Impedance Analysismentioning
confidence: 99%
“…It has a higher melting temperature (2430°C) than a number of other wellknown oxides [8]. Y 2 O 3 has a wide energy band gap, high values of electrical resistivity (10 11 -10 12 ohm/m), dielectric permittivity (11)(12)(13)(14)(15) and electric strength (10 8 -10 9 Vm −1 ), and it also shows low dielectric losses (0.01-0.03) and good transparency in a wide spectral range with little light diffusion [9][10][11][12][13]. Due to these properties, Y 2 O 3 is a prospective material for antireflecting and protective coatings, interference mirrors and for manufacturing passive components and dielectric layers in multilevel integrated circuits [10].…”
Section: Introductionmentioning
confidence: 99%
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