Structural Transformation upon Nitrogen Doping of Ultrananocrystalline Diamond Films by Microwave Plasma CVD

Abstract

The molecular properties and surface morphology of undoped and N-doped ultra-nanocrystalline diamond (UNCD) films deposited by microwave plasma CVD with addition of nitrogen are investigated with various spectroscopic techniques. The results of spatially resolved Raman scattering, ATR/FT-IR and XPS spectra show more amorphous andsp2/sp3ratio characteristics in N-doped UNCD films. The surface morphology in AFM scans shows larger nanocrystalline diamond clusters in N-doped UNCD films. Incorporation of nitrogen into UNCD films has promoted an increase of amorphoussp2-bonded carbons in the grain boundaries and the size of nanocrystalline diamond grains that are well correlated to the reported enhancement of conductivity and structural changes of UNCD films.

Locally Resolved Electron Emission Area and Unified View of Field Emission from Ultrananocrystalline Diamond Films

“…The increased sp 2 content in (N)­UNCD films on the SS substrate may be due to the out diffusion of Fe and Ni from the substrate as well as from the Ni buffer layer. This behavior is consistent with previous studies, as reported in refs − . This is also consistent with our previous measurements: an (N)­UNCD film on pure Mo substrate displayed I D /I G = 1.6, while a (N)­UNCD on Mo/SS had I D /I G = 1.3 .…”

Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

“…The peak at 1190 cm -1 can also be related with the t-PA phase. For instance, similar peaks were found for the nitrogen-doped UNCD films grown by microwave plasma CVD [24] and undoped UNCD films grown by a microwave plasma jet [25]. No phase could be identified from the peak position at about 1400 cm -1 marked by (*).…”

Nitrogen-doped Diamond Nanowire Gas Sensor for the Detection of Methane

“…Typically, UNCD films contain the mixtures of sp2/sp3-bonded carbon (trans-polyacetylene (t-PA) like, and graphite-like sp 2 -bonded CH groups and sp 3 -bonded CH2 groups), with C-H vibration characteristics at 1120 -1190 cm -1 . The peak lower than 1000 cm -1 is not related to the UNCD which could be from the Si substrate [14].…”