Abstract:This paper reports on structural characterization of InGaN-based light-emitting diode (LED) with AlN/InGaN buffer layer, AlN/GaN multi layer (ML) intermediate layer and AlGaN/GaN strain layer superlattices (SLS). The LED was epitaxially grown on Si (111) by metal organic chemical vapor deposition (MOCVD) that comprises of InGaN/InGaN multi quantum-wells (MQWs) active layer sandwiched between InGaN under-layer and over-layer. Phase analysis (PA) 2Thetascan x-ray diffraction (XRD) proved the existence of single … Show more
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