Structural-phase inhomogeneity of aluminum films in multilayer systems

Abstract

The work is devoted to the study of the influence of the sequence of metal layers in two-layer films (Al 0.5% Ni)/Mo and composition SiO2/Si (111) on the phase composition and structural perfection of Al 0.5% Ni films. The samples used in the experiment were two-layer metal films (Al 0.5% Ni)/Mo and Mo/(Al 0.5% Ni), which were deposited on monosilicon substrates of orientation (111) and composition SiO2/Si (111). The influence of the arrangement of metal layers on the phase composition, crystallographic orientation of aluminum grains and their distribution over the thickness of Al 0.5% Ni films has been studied. It is shown that the annealing of the Al/Mo/Al system in an oxygen atmosphere significantly affects the density of oxides on the surface of the aluminum film, which is facilitated by the high affinity of aluminum for oxygen and the polymorphism of its compounds with oxygen in a wide temperature range.