“…Among these currently known lead-based ferroelectrics, one of particular interest is a La/Ca-modified PbTiO 3 [(La/Ca,Pb)TiO 3 ] thin film due to its enhanced electrical properties, including a large piezoelectric constant and polarization, a high pyroelectric coefficient and electrocaloric coefficient, as well as a significant photovoltaic current. − These features allow it to have great potential in the applications of various electronic devices, such as memories, microelectromechanical systems (MEMS), cooling devices, photoelectric sensors, and so on. ,,, At present, however, current applications of (La/Ca,Pb)TiO 3 thin films are still limited due to the difficulties in controlling the film’s electrical quality. For instance, it is a great challenge to eradicate deteriorative impure phases and growth defects in (La/Ca,Pb)TiO 3 films, such as pyrochlore phase and − cation/anion vacancy, − due to the volatility of lead oxide and the fluctuated valence of a Pb ion. These impure phases and growth defects are apt to induce a high leakage current in a (La/Ca,Pb)TiO 3 thin film, which will essentially “wipe out” the ferroelectric polarization and its associated electrical properties.…”