“…The lineshape and spectral position of Cd peak in the initial spectrum (before the first sputtering step), distinctly different from the bulk, are due to cadmium oxide and hydroxide on the film surface, which are removed together with other surface contamination. High‐resolution XPS spectra of amorphous As–Se–S [ 12,13 ] as well as related binary As–Se [ 34–36 ] and As–S [ 37,38 ] systems were thoroughly studied; therefore, we focus here primarily on the features related to Cd doping. High‐resolution XPS spectra consecutively measured from the same surface area of a Cd‐doped As 2 (Se 0.5 S 0.5 ) 3 film after 1,000 eV Ar + ion sputtering (the duration of each sputtering session was 30 s) enabled us to trace the variation of As, S, Se, and Cd concentrations as functions of the sputtering duration.…”