A heavy phosphorus doped hydrogenated nanocrystalline silicon
((n+)nc-Si:H) film was deposited by plasma enhanced chemical vapour deposition technique
on a heavy doped p-type crystal silicon substrate to form a heterojunction of
(n+)nc-Si:H/(p+)c-Si. From
electrical measurements of this prepared structure, both negative resistance in forward current–voltage
(I–V) measured plots and large reverse current in reverse
I–V
experimental curves were observed, which reveal the structure as a semiconductor
backward diode. The forward current can be assigned to interband tunnel,
excess, hump and thermionic emission component, while the reverse current
which shows exponential dependence on applied voltage can be ascribed to
an internal field emission (Zener mechanism) term. Also, the crucial role of
(n+)nc-Si:H
in I–V
characteristics was analyzed.