2013
DOI: 10.1007/s11082-013-9757-2
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Structural, optical and electrical properties of ZnO:Al thin films for optoelectronic applications

Abstract: Undoped and aluminum-doped ZnO thin films are prepared by the sol-gel spincoating process. Zinc acetate dihydrate, ethanol and mono-ethanolamine are used as precursor, solvent and stabilizer, respectively. The atomic percentage of dopant in solution were [Al/Zn] = 1 %, 2 % and 3 %. The effect of Al doping on the optical and electrical properties of ZnO films was investigated by X-ray diffraction (XRD), Four-Point probe technique and UV-visible spectrophotometery. The results from the X-ray diffraction show tha… Show more

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Cited by 91 publications
(35 citation statements)
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“…ZnO:Al and ZnO:Ga thin films have been produced by a wide variety of techniques, including chemical and physical processes, such as pulsed laser deposition 6 , chemical vapor deposition 7 , spray pyrolysis 8 , sol-gel technique 9 , atomic layer deposition 10 and magnetron sputtering 11 onto a variety of substrates. Among these methods, magnetron sputtering is especially interesting, because it can not only be conducted at low temperatures, but can also produce high-quality crystalline intrinsic and doped ZnO thin films 12 .…”
Section: Introductionmentioning
confidence: 99%
“…ZnO:Al and ZnO:Ga thin films have been produced by a wide variety of techniques, including chemical and physical processes, such as pulsed laser deposition 6 , chemical vapor deposition 7 , spray pyrolysis 8 , sol-gel technique 9 , atomic layer deposition 10 and magnetron sputtering 11 onto a variety of substrates. Among these methods, magnetron sputtering is especially interesting, because it can not only be conducted at low temperatures, but can also produce high-quality crystalline intrinsic and doped ZnO thin films 12 .…”
Section: Introductionmentioning
confidence: 99%
“…Zinc Oxide (ZnO) thin film has been extensively studied for their attractive properties in electronic and optoelectronic applications [1] such as rectifiers, filters, resonators for radio communications and image processing [2]- [4]. Thin films of Zinc Oxide can also be used in chemical sensors which are highly sensitive gas detectors [5] [6].…”
Section: Introductionmentioning
confidence: 99%
“…In this case, doping can be achieved by simply including an additional doping precursor within the synthesis solution, such as aluminum chloride, tin chloride and silver nitrate. This approach was explored to successfully dope porous ZnO with various elements, including Al [67,68], Sn [69], Ag [70], Na [71], Mg [72] and many others [73,74]. Similarly to pristine ZnO, the resulting doped structures were found to be highly promising in view of gas sensors fabrication, especially for ammonia and H 2 S detection.…”
Section: Spray Pyrolysismentioning
confidence: 99%