Structural investigation of LN/LT¹ superlattice thin films by field effect scanning transmission electron microscopy equipped with electron disspersive x-ray spectroscopy

Abstract

Superlattice thin films are fabricated by the pulsed laser deposition method using LiNbO 3 and LiTaO 3 as target members. Through our structural and compositional analyses by x-ray diffractometry and field effect scanning transmission electron microscopy with electron dispersive x-ray spectroscopy, these films are found to contain Li-deficient phase, i.