Structural health monitoring using polymer-based capacitive micromachined ultrasonic transducers (CMUTs)

Hutchins, David A.; Billson, D.R.; Bradley, Robert; Ho, K. S.

doi:10.1016/j.ultras.2011.04.004

Cited by 22 publications

(10 citation statements)

References 12 publications

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“…26A and B shows the waveform received by Fig. 23 Schematic diagram of an MSL system [70]. MSL Z microstereolithography.…”

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

“…24 Details of how (A) a cone would be constructed; from (B) a series of imaginary layers; to give (C) a real object that would result from such an MSL process. In practice, the layers would be sufficiently thin that individual steps would not be visible [70]. MSL Z microstereolithography.…”

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

“…Fig. 25 A typical polymer CMUT as constructed using MSL techniques [70]. cMUT Z capacitive micromachined ultrasonic transducer; MSL Z microstereolithography.…”

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

“…Furthermore, ultrasound detects liveness, and therefore can easily detect fakes. [70]. cMUT Z capacitive micromachined ultrasonic transducer, Coventry, UK.…”

Section: Biometric Technology and Capabilitymentioning

confidence: 99%

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Capacitive Micromachined Ultrasonic Transducers: Technology and Application

Salim¹,

Malek²,

Heng³

et al. 2012

Journal of Medical Ultrasound

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KEY WORDScapacitive micromachined ultrasonic transducer, fabrication, image sensor, ultrasonography Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity. This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane. Several important applications are presented to show the feasibility of using cMUTs which are demonstrated by imaging examples in immersion and air due to the cMUT capability of producing large bandwidth (123% fractional bandwidth) and lower impedance mismatch. Finally, the advantages of three-dimensional echographic images based on moving ultrasound linear array its technique are discussed in detail and compared with those of two-dimensional optical hand geometry. ª

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“…26A and B shows the waveform received by Fig. 23 Schematic diagram of an MSL system [70]. MSL Z microstereolithography.…”

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

“…Fig. 25 A typical polymer CMUT as constructed using MSL techniques [70]. cMUT Z capacitive micromachined ultrasonic transducer; MSL Z microstereolithography.…”

Section: Detection Of Internal Solid Materials Defects Using Lamb Wavesmentioning

confidence: 99%

“…Furthermore, ultrasound detects liveness, and therefore can easily detect fakes. [70]. cMUT Z capacitive micromachined ultrasonic transducer, Coventry, UK.…”

Section: Biometric Technology and Capabilitymentioning

confidence: 99%

See 2 more Smart Citations

Capacitive Micromachined Ultrasonic Transducers: Technology and Application

Salim¹,

Malek²,

Heng³

et al. 2012

Journal of Medical Ultrasound

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“…5,6 The proof of concept for SHM applications has been demonstrated during the last decade. [7][8][9] They have shown that, in spite of a low signal-to-noise ratio compared to the piezoelectric transducer, the CMUTs are able to detect, for example, acoustic emission events. In our work, the CMUTs of interest have been developed by Galisultanov et al 10 and the technology is presented in the next section.…”

Section: Introductionmentioning

confidence: 99%

CMUT sensors based on circular membranes array for SHM applications

Butaud

Bourbon

Moal

et al. 2019

Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2019

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A MEMS sensor dedicated to SHM applications is presented. The MEMS is made of a Capacitive Micromachined Ultrasonic Transducer (CMUT) chip composed of circular membranes array. The radius of the membranes vary between 50 µm and 250 µm and hence the associated resonance frequencies between 80 kHz and 2 MHz. A wide frequency bandwidth is then available for acoustic measurements. A testing campaign is conducted in order to characterize the MEMS sensor's behavior when subjected to single-frequency and broadband excitation stimuli. The single-frequency excitations are produced with specific piezoelectric transducers from 300 kHz to 800 kHz. The Fast Fourier Transform (FFT) of the measured signal from the CMUT is centered as expected on the excitation frequency. The broadband excitation is obtained with a pencil lead break. In this case, the FFT of the measured signal is centered on the resonance frequency of the membrane. These characterizations point out the DC bias voltage applied to the CMUT as a major parameter for controlling the sensitivity of the sensor. The CMUT sensor proves to be sufficiently sensitive to monitor these sources. This work highlights the relevant prospective capacities of the CMUT sensor to collect data in structural health monitoring applications. This sensor technology could be externally deployed, or even integrated into a composite structure, in order to monitor the structure by the CMUT detection, either by active ultrasound tests or by passive acoustic emission.

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Acoustic emission sensors for assessing and monitoring civil infrastructures

Meo

2022

Sensor Technologies for Civil Infrastructures

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Structural health monitoring using polymer-based capacitive micromachined ultrasonic transducers (CMUTs)

Cited by 22 publications

References 12 publications

Capacitive Micromachined Ultrasonic Transducers: Technology and Application

Capacitive Micromachined Ultrasonic Transducers: Technology and Application

CMUT sensors based on circular membranes array for SHM applications

Acoustic emission sensors for assessing and monitoring civil infrastructures

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