Structural Evolution of B–C Thin Films Deposited from SPSed‐Target and Dual‐Target

Abstract

Boron carbide thin films have been synthesized via pulsed laser deposition process using Spark Plasma Sintered (SPSed) and dual‐targets, respectively. Two kinds of structural evolutions have been found by investigation of bonding environments in as‐deposited thin films via X‐ray photoelectron spectroscopy study. With decreasing of B/C ratio, films deposited from SPSed‐target show the transformation of B11C‐CBB → B11C‐CBC. In contrast, the films deposited from dual‐target present the B11C‐CBB → B10C2‐CBB structural change.

Fabrication of (a-nc) boron carbide thin films via chemical vapor deposition using ortho-carborane

“…This also indicates that the icosahedral structure of ortho-carborane is no longer complete. Peaks appearing on the higher binding energies around 286.2 eV and 288 eV correspond to C = C and C-O bonds, respectively, [26,27]. Peaks observed near 283 eV correspond to C-B bond is inferior in film deposited at low temperature [ Figure 4(f,g)], then increases with increasing boron content [ Figure 4(h-j)] [13].…”

Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets

“…Unfortunately, the films were carbon poor, and carbon content was changed in a narrow range of 26.4∼32.8% caused by the composition limitation of the boron carbide starting material. Also in our previous works, [19][20][21] in the case of B x C y films, stoichiometric controlling for both elements in large scale have been done by using "smart" target, dual target.…”