Thin Film Nanophotonics 2021
DOI: 10.1016/b978-0-12-822085-6.00005-4
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Structural, electrical, and electromagnetic properties of nanostructured vanadium dioxide thin films

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Cited by 4 publications
(12 citation statements)
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“…Various synthesis methods have provided different characteristic values for VO 2 , including sputtering, sol-gel synthesis, atomic layer deposition, chemical vapor deposition, and pulsed laser deposition (PLD) [5]. The main factors that influence the processing methods are thickness, meta-morphology, impurity, microstructure, and oxygen concentration.…”
Section: Introductionmentioning
confidence: 99%
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“…Various synthesis methods have provided different characteristic values for VO 2 , including sputtering, sol-gel synthesis, atomic layer deposition, chemical vapor deposition, and pulsed laser deposition (PLD) [5]. The main factors that influence the processing methods are thickness, meta-morphology, impurity, microstructure, and oxygen concentration.…”
Section: Introductionmentioning
confidence: 99%
“…The insulator to metal transition temperature (T c ) depends on the oxygen concentration and the V/O ratio. The doping concentration M adjusts the T c in the V 1−x M x O 2 system, where M is a divalent metal [5]. Specifically, a small amount of tungsten (W) reduces the T c at the expense of reduction on resistances at room temperature [7].…”
Section: Introductionmentioning
confidence: 99%
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