2005
DOI: 10.1557/proc-875-o12.9
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Structural Control of Lithium Fluoride Thin Films

Abstract: Polycrystalline lithium fluoride thin films have a number of existing and potential uses, but the optimization of their microstructure has not yet been addressed systematically. We have developed a means of measuring the porosity in LiF films, and a method for performing detailed electron-microscopical studies on this normally beamsensitive material. These techniques have been applied to assess the structure of LiF films immediately after deposition from the vapor phase, and also after subsequent annealing.

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“…However, this is difficult to achieve in practice. The size of the grains accompanied by surface roughness is sensitive to deposition conditions and often changes during the growth [12][13][14]. In the first phase of deposition, polycrystalline material with very fine grains grows.…”
Section: Introductionmentioning
confidence: 99%
“…However, this is difficult to achieve in practice. The size of the grains accompanied by surface roughness is sensitive to deposition conditions and often changes during the growth [12][13][14]. In the first phase of deposition, polycrystalline material with very fine grains grows.…”
Section: Introductionmentioning
confidence: 99%