Structural characterization of TiCx films prepared by plasma based ion implantation

Li, G; Xia, Libin

doi:10.1016/s0040-6090(01)01227-5

Cited by 73 publications

(25 citation statements)

References 24 publications

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“…Between these contributions C-Si bonds, at 282.5 eV, are expected. For nanocomposite Ti-C materials additional contributions have also been reported in this region [37,38,39,40,41,42,43,44], which have been associated with several different causes, including ion beam sputtering damage [42], and an interfacial state between nc-TiC and a-C phase [12,40,41,43]. Such contribution can hence not be excluded in the present samples, and is indicated in Figure 4 by TiC*.…”

Section: The Influence Of the Target-to-substrate Distance And Pressurementioning

confidence: 75%

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Lauridsen

Eklund

Joelsson

et al. 2010

Surface and Coatings Technology

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2 transport of the species. Increased target-to-substrate distance from 2 cm to 8 cm resulted in a higher carbon-to-titanium ratio in the coatings than for the Ti 3 SiC 2 compound target, due to different gas-phase scattering properties between the sputtered species. The coatings microstructure could be modified from nanocrystalline to predominantly amorphous by changing the pressure and target-to-substrate conditions to 4 mTorr and 2 cm, respectively. A decreased pressure from 10 mTorr to 4 or 2 mTorr at a target-tosubstrate distance of 2 cm decreased the deposition rate up to a factor of ~7 as explained by resputtering and an increase in the plasma sheath thickness. The coatings exhibited electrical resistivity in the range 160-800 µΩcm, contact resistance down to 0.8 mΩ at a contact force of 40 N, and nanoindentation hardness in the range 6-38 GPa.

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Section: The Influence Of the Target-to-substrate Distance And Pressurementioning

confidence: 75%

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Lauridsen

Eklund

Joelsson

et al. 2010

Surface and Coatings Technology

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show abstract

“…In the figure, the peaks at 455.5 eV and 461.3 eV (red) can be attributed to Ti 2p 3/2 and 2p 1/2 of Ti-C bond, respectively [49]. The peaks at 458.8 and 464.6 eV (dark yellow) belong to the Ti in Ti-O bond (from TiO 2 ), which is always present on the TiC surface due to air oxidization [50]. The peaks at [50].…”

Section: Resultsmentioning

confidence: 96%

Synergistic enhancement of electrochemical performance of electrospun TiC/C hybrid nanofibers for supercapacitor application

Ren

Dai

Pang

et al. 2015

Electrochimica Acta

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“…In the nanocomposite C 1s spectrum, an additional shoulder is observed at about ϳ283 eV binding energy between the C-C and Ti-C peaks, which we denote C-Ti ‫ء‬ . 3,7,[11][12][13][14][15][16] The intensity of this additional feature increases upon sputter etching. 17 However, recent studies with high-energy XPS have shown that it is present also in unsputtered samples.…”

Section: Introductionmentioning

confidence: 99%

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

et al. 2009

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The electronic structure of nanocrystalline ͑nc-͒ TiC/amorphous C nanocomposites has been investigated by soft x-ray absorption and emission spectroscopy. The measured spectra at the Ti 2p and C 1s thresholds of the nanocomposites are compared to those of Ti metal and amorphous C. The corresponding intensities of the electronic states for the valence and conduction bands in the nanocomposites are shown to strongly depend on the TiC carbide grain size. An increased charge transfer between the Ti 3d-e g states and the C 2p states has been identified as the grain size decreases, causing an increased ionicity of the TiC nanocrystallites. It is suggested that the charge transfer occurs at the interface between the nanocrystalline-TiC and the amorphous-C matrix and represents an interface bonding which may be essential for the understanding of the properties of nc-TiC/amorphous C and similar nanocomposites.

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Structural characterization of TiCx films prepared by plasma based ion implantation

Cited by 73 publications

References 24 publications

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

Synergistic enhancement of electrochemical performance of electrospun TiC/C hybrid nanofibers for supercapacitor application

Electronic structure and chemical bonding of nanocrystalline-TiC/amorphous-C nanocomposites

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