Structural and phase composition of fullerene films deposited by high-power ion beams

The regularities of solid surface erosion and coating deposition using high-power pulsed beams of charged particles

“…The productivity of a pulse coating-deposition technology is characterized not only by its rate Z dep but also by the pulse repetition rate m. The deposition experiments with metal coatings show that, when the accelerator operates in the frequency-pulse regime, the thickness of the coatings is directly proportional to Z dep and m [16,17]. Consequently, the average deposition rate f dep , which characterizes the technological process productivity, is equal to…”

“…6 shows the dependence of the graphite coating deposition rate on the distance L between the target and the substrate, which is obtained for the submicrosecond ion beam of a ''Vera'' accelerator (beam composition: 60%H + + 40%C + , E 0 = 500 keV, and s = 100 ns). The solid lines show the results of our calculations, and the dots show the experimental data taken from [16]. The maximum coating thickness is obtained; this maximum is reached where the substrate surface is opposite to a target center.…”

“…Fig. 7 demonstrates the dependence of the rate deposition Z dep and the technological productivity of the metal coating deposition f dep on the ion beam energy density F for a submicrosecond accelerator of the ''Temp-2'' type [16], whose pulse repetition rate is 0.083 Hz. Here, the distance between the target and the substrate is 5 cm, the incidence angle of the beam to the target is 45°, and the radius of the beam trace on the target surface is 2.5 cm.…”

“…6. The coating deposition rate (Z dep ) versus the energy density F and the distance L between the target and the substrate in a graphite-target irradiation experiment using an ion beam (the beam consists of 60%H + + 40%C + , E 0 = 500 keV, s = 100 ns, the incidence angle of the beam to the target is 40 to 45 o , and the beam trace diameter is 50 mm); the solid lines represent the calculation, and the dots represent the experimental data from [16].…”